Technique for improving quality of functioning of a self-oscillating micromechanical accelerometer

Currently the manufacture of small-size unmanned flying vehicles is actively developed; that leads to a necessity of creating reliable and precise microelectromechanical sensors. Many of them can operate under strictly determined conditions. The presented methodology allows creating sensors in such a way that they can preserve small sizes and basic quality parameters under various operation conditions. Due to the presence of magnetic elements it is necessary to take into account the influence of an external magnetic field, for it is able to seriously interfere with the operation of the sensor and lead to inaccurate measurement results, and paths with current are able to increase temperature in a closed volume of the device housing, which will affect its static and power characteristics. The choice of geometric parameters and materials for manufacture of the magnetic screen, the method of reduction and elimination of thermal effects has been substantiated.