Low-Energy Ne+ Ion Channeling and Implantation into Cu(100) and Cu3Au(100)

ABSTRACTBy computer simulation details have been observed regarding the dynamics of the change of the character of trajectories, the range and energy losses of channeled ions, as well as the angular and energy distributions of ions transmitted through thin crystal versus the composition of single crystal, the impact parameters from the center of the channel and the initial energy. It has been established that for a paraxial part of a channeled beam the inelastic energy losses comprise the main loss of energy. The elastic energy losses of the channeling ions in the case of Cu3Au(100) crystal are larger than in the case of Cu(100). As Au atoms are heavier than Cu atoms, in the case of Cu3Au(100) the degree of the dechanneling of particles is greater and the range is smaller in comparison with the similar characteristics for Cu(100).