Electron-Beam Deposition of Aluminum Nitride and Oxide Ceramic Coatings for Microelectronic Devices

This work presents the results of the coating deposition by electron-beam evaporation of aluminum nitride and aluminum oxide targets in nitrogen and oxygen atmospheres in the forevacuum range (5–30 Pa). The method we employed is a combination of the electron-beam and plasma methods, since in the mentioned pressure range, the electron beam creates plasma that essentially changes the interaction picture of both the electron beam with the ceramic target and the flux of evaporated material with a substrate. We show a possibility of depositing such coatings on monolithic microwave integrated circuits passivated by Si3N4 dielectric.

The effect of electrolyte composition on the plasma electrolyte oxidation and phase composition of oxide ceramic coatings formed on 2024 aluminium alloy

Purpose: Purpose of this work is to analyse the process of synthesis of oxide ceramic coatings in plasma electrolytes on 2024 aluminium alloy and to form an electrolyte which allows to reduce energy consumption for the coating formation. Design/methodology/approach: The oxide ceramic coatings were synthesized on 2024 aluminium alloy. The coatings were formed by the alternate application of anode and cathode pulses to the sample. X-ray diffraction analysis of coatings was performed on a DRON-3.0 X-ray diffractometer using CuKα radiation. The thickness of the coatings was determined using a CHY TG-05 thickness gauge. The porosity of the coatings was investigated by analysing the micrographs of the plasma electrolyte oxidation (PEO) coatings obtained on a scanning electron microscope at ×500 magnification using the image processing technique. Findings: The electrolyte with 5 g/l H2O2 additive have been elaborated as an optimal composition for synthesis of a coating with an increased content of corundum (α-Al2O3) as compared to a coating synthesized in the same mode in the 3KOH+2Na2SiO3 electrolyte without H2O2. This synthesis mode allows obtaining a coating with a high corundum content at low energy consumption. Research limitations/implications: For further optimization of the synthesis modes, it is necessary to analyse the influence of the phase composition and porosity of the obtained oxide ceramic coatings on their microhardness, wear resistance, and corrosion resistance. Practical implications: Based on the developed modes of synthesis of the coatings, it will be possible to obtain wear and corrosion resistant oxide ceramic coatings with predetermined functional properties and to reduce energy consumption for their formation. Originality/value: Methods for accelerating the formation of coatings have been proposed and tested, in particular, by adding various amounts of hydrogen peroxide to the electrolyte. The content of oxides in the obtained coatings, in particular, their ratios at various concentrations of hydrogen peroxide in the electrolyte, were determined by X-ray phase analysis. The modes of synthesis of the coatings were developed which allow obtaining a continuous coating without cracks with simultaneous decreasing porosity from 4.32% to 3.55–3.53%.

Introduction to Plasma Electrolytic Oxidation—An Overview of the Process and Applications

Plasma electrolytic oxidation (PEO), also called micro-arc oxidation (MAO), is an innovative method in producing oxide-ceramic coatings on metals, such as aluminum, titanium, magnesium, zirconium, etc. The process is characterized by discharges, which develop in a strong electric field, in a system consisting of the substrate, the oxide layer, a gas envelope, and the electrolyte. The electric breakdown in this system establishes a plasma state, in which, under anodic polarization, the substrate material is locally converted to a compound consisting of the substrate material itself (including alloying elements) and oxygen in addition to the electrolyte components. The review presents the process kinetics according to the existing models of the discharge phenomena, as well as the influence of the process parameters on the process, and thus, on the resulting coating properties, e.g., morphology and composition.

Aluminum Oxide Ceramic Coatings on 316l Austenitic Steel Obtained by Plasma Electrolysis Oxidation Using a Pulsed Unipolar Power Supply

AISI 316 steel has good corrosion behavior and high-temperature stability, but often prolonged exposure to temperatures close to 700 °C in aggressive environments (e.g., in boilers and furnaces, in nuclear installations) can cause problems that lead to accelerated corrosion degradation of steel components. A known solution is to prepare alumina ceramic coatings on the surface of stainless steel. The aim of this study is to obtain aluminum oxide ceramic coatings on 316L austenitic steel, by Plasma Electrolysis Oxidation (PEO), using a pulsed unipolar power supply. The structures obtained by PEO under various experimental conditions were characterized by XPS, SEM, XRD, and EDS analyses. The feasibility was proved of employing PEO in NaAlO2 aqueous solution using a pulsed unipolar power supply for ceramic–like aluminum oxide films preparation, with thicknesses in the range of 20–50 μm, and a high content of Al2O3 on the surface of austenitic stainless steels.

Investigation of Internal Stresses in Thin Layer Oxide Coatings on Aluminum Alloys

Among physical and mechanic properties of coatings the internal stresses are of special interest. Internal stresses include stresses which exist and are counterbalanced within a rigid body in cases when there is no external action which caused them. In coatings obtained on the basis of nickel, chrome they can decrease the adhesive strength, cause cracking, peeling, anticorrosion properties deterioration. But the definite level of internal stresses leads to increase of hardness and coatings wear resistance and also facilitates porous coatings obtaining. The results of theoretical and experimental investigations of the internal stresses that appear in oxide ceramic coatings formed by plasma-electrolytic oxidation (PEO) on aluminum surfaces are presented.