enhance chemical vapor deposition
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Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Effect of bias voltage on the properties of hydrogenated amorphous carbon films fabricated on CoCrMo alloy by electron cyclotron resonance plasma enhance chemical vapor deposition (ECR-PECVD)

Physics Procedia ◽

10.1016/j.phpro.2011.06.069 ◽

2011 ◽

Vol 18 ◽

pp. 122-127 ◽

Cited By ~ 1

Author(s):

Xingrui Deng ◽

Y.X. Leng ◽

H.Sun ◽

Nan Huang

Keyword(s):

Vapor Deposition ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Chemical Vapor ◽

Carbon Films ◽

Cocrmo Alloy ◽

Amorphous Carbon Films ◽

Hydrogenated Amorphous ◽

Enhance Chemical Vapor Deposition ◽

Resonance Plasma

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Comparison between SiOC Thin Film by plasma enhance chemical vapor deposition and SiO2 Thin Film by Fourier Transform Infrared Spectroscopy

Journal of the Korean Physical Society ◽

10.3938/jkps.56.1150 ◽

2010 ◽

Vol 56 (4) ◽

pp. 1150-1155 ◽

Cited By ~ 56

Author(s):

teresa OH ◽

Chi Kyu Choi

Keyword(s):

Thin Film ◽

Fourier Transform ◽

Infrared Spectroscopy ◽

Chemical Vapor Deposition ◽

Fourier Transform Infrared Spectroscopy ◽

Vapor Deposition ◽

Chemical Vapor ◽

Fourier Transform Infrared ◽

Sio2 Thin Film ◽

Enhance Chemical Vapor Deposition

Download Full-text