thickness gauging
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Author(s):  
Milad Yahyapour ◽  
Angelika Jahn ◽  
Katja Dutzi ◽  
Thomas Puppe ◽  
Patrick Leisching ◽  
...  

2019 ◽  
Vol 9 (7) ◽  
pp. 1283 ◽  
Author(s):  
Milad Yahyapour ◽  
Angelika Jahn ◽  
Katja Dutzi ◽  
Thomas Puppe ◽  
Patrick Leisching ◽  
...  

We apply a fast terahertz time-domain spectroscopy (TDS) system based on electronically controlled optical sampling (ECOPS) to contact-free thickness gauging. Our setup achieves a measurement speed of 1600 terahertz pulse traces per second, which—to our knowledge—represents the fastest thickness measurement performed with any terahertz system to-date. Using a silicon wafer as a test sample, we compare data of the ECOPS experiment to results obtained with a conventional terahertz TDS system and a mechanical micrometer gauge. We show that all systems provide consistent results within the measurement accuracy. Moreover, we perform thickness measurements of a rapidly moving sample and characterize the ECOPS setup with respect to time-domain dynamic range, signal-to-noise ratio, and spectral properties.


2018 ◽  
pp. 159-198
Author(s):  
David M. Scott
Keyword(s):  

2018 ◽  
Vol 54 (3) ◽  
pp. 147-150 ◽  
Author(s):  
S. Yu. Gurevich ◽  
Yu. V. Petrov ◽  
E. V. Golubev
Keyword(s):  

2017 ◽  
pp. 10-17
Author(s):  
V. A. Syasko ◽  
S. S. Golubev ◽  
A. I. Potapov ◽  
N. I. Smirnova
Keyword(s):  

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