dc cylindrical magnetron sputtering
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Effect of O2 in O2/Ar Gas Mixture on Morphological and Optical Properties of TiO2 Thin Films Deposited by DC Cylindrical Magnetron Sputtering

2013 ◽  
Vol 32 (4) ◽  
pp. 488-495 ◽  
Author(s):  
S. A. Hoseini ◽  
M. R. Hantehzadeh ◽  
P. Salavati Dezfooli ◽  
Sadjad Salavati Dezfooli ◽  
S. Najmodein Hoseini
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Magnetron Sputtering ◽  
Gas Mixture ◽  
Tio2 Thin Films ◽  
Cylindrical Magnetron ◽  
Ar Gas ◽  
Dc Cylindrical Magnetron Sputtering
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