alternating phase shift mask
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Measuring Method of Polarization Aberration Based on Vector Aerial Image of Alternating Phase-shift Mask

2016 ◽  
Vol 36 (8) ◽  
pp. 0811003
Author(s):  
沈丽娜 Shen Lina ◽  
王向朝 Wang Xiangzhao ◽  
李思坤 Li Sikun ◽  
闫观勇 Yan Guanyong ◽  
诸波尔 Zhu Boer ◽  
...  
Keyword(s):  
Phase Shift ◽  
Measuring Method ◽  
Aerial Image ◽  
Phase Shift Mask ◽  
Alternating Phase Shift Mask

EUVL alternating phase shift mask

2011 ◽  
Author(s):  
Pei-Yang Yan ◽  
Alan Myers ◽  
Yashesh Shroff ◽  
Manish Chandhok ◽  
Guojing Zhang ◽  
...  
Keyword(s):  
Phase Shift ◽  
Phase Shift Mask ◽  
Alternating Phase Shift Mask

Alternating phase-shift mask and binary mask for 45-nm node and beyond: the impact on the mask error control

2007 ◽  
Author(s):  
Yosuke Kojima ◽  
Masanori Shirasaki ◽  
Kazuaki Chiba ◽  
Tsuyoshi Tanaka ◽  
Yukio Inazuki ◽  
...  
Keyword(s):  
Phase Shift ◽  
Error Control ◽  
Binary Mask ◽  
Phase Shift Mask ◽  
The Impact ◽  
Alternating Phase Shift Mask

New double exposure technique without alternating phase-shift mask

2007 ◽  
Author(s):  
Tomohiko Yamamoto ◽  
Teruyoshi Yao ◽  
Hiroki Futatsuya ◽  
Tatsuo Chijimatsu ◽  
Satoru Asai
Keyword(s):  
Phase Shift ◽  
Double Exposure ◽  
Phase Shift Mask ◽  
Exposure Technique ◽  
Alternating Phase Shift Mask

Alternating phase-shift mask and binary mask for 45-nm node and beyond: the impact on the mask error control

2007 ◽  
Author(s):  
Yosuke Kojima ◽  
Masanori Shirasaki ◽  
Kazuaki Chiba ◽  
Tsuyoshi Tanaka ◽  
Yukio Inazuki ◽  
...  
Keyword(s):  
Phase Shift ◽  
Error Control ◽  
Binary Mask ◽  
Phase Shift Mask ◽  
The Impact ◽  
Alternating Phase Shift Mask

Investigation of Optimum Biasing and Undercut for Single Trench Alternating Phase Shift Mask in 193 nm Lithography

2006 ◽  
Vol 45 (11) ◽  
pp. 8920-8924 ◽  
Author(s):  
Ji-Eun Lee ◽  
Hye-Young Kang ◽  
Dong-Soo Shin ◽  
Hee-Jun Jeong ◽  
Ilsin An ◽  
...  
Keyword(s):  
Phase Shift ◽  
193 Nm ◽  
Phase Shift Mask ◽  
Alternating Phase Shift Mask

Alternating phase shift mask technology for 65nm logic applications

2006 ◽  
Author(s):  
Kishore K. Chakravorty ◽  
Sven Henrichs ◽  
Wei Qiu ◽  
Joas L. Chavez ◽  
Yi-Ping Liu ◽  
...  
Keyword(s):  
Phase Shift ◽  
Phase Shift Mask ◽  
Alternating Phase Shift Mask
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