Characterization of AlGaAs/InGaAs/GaAs Heteroepitaxial Layers by Transmission Electron Microscopy and Energy Dispersive Spectroscopy

ABSTRACTAlGaAs/InGaAs/GaAs heteroepitaxial layers grown by molecular beam epitaxy were studied by cross-sectional transmission electron microscopy (TEM) and energy dispersive spectroscopy (EDS). The presence of waviness/roughness, fine periodic striation contrast due to Al composition oscillations, and defects were observed by TEM in selected samples. EDS on the TEM was of limited utility in determining the composition of thin epitaxial layers and in comparing the composition near and away from a defect. Arguments are presented to rationalize these results.