high plasma power
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High-performance a-SiGe:H thin film prepared by plasma-enhanced chemical vapor deposition with high plasma power for solar-cell application

physica status solidi (a) ◽

10.1002/pssa.201228281 ◽

2012 ◽

Vol 209 (12) ◽

pp. 2527-2531 ◽

Cited By ~ 5

Author(s):

Baojun Yan ◽

Lei Zhao ◽

Bending Zhao ◽

Jingwei Chen ◽

Guanghong Wang ◽

...

Keyword(s):

Thin Film ◽

Chemical Vapor Deposition ◽

Solar Cell ◽

Vapor Deposition ◽

High Performance ◽

Chemical Vapor ◽

High Plasma ◽

Plasma Power ◽

Solar Cell Application ◽

High Plasma Power

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Ga2O3 THIN FILM DEPOSITED BY ATOMIC LAYER DEPOSITION WITH HIGH PLASMA POWER

Integrated Ferroelectrics ◽

10.1080/10584580600657666 ◽

2006 ◽

Vol 80 (1) ◽

pp. 197-206 ◽

Cited By ~ 17

Author(s):

F. K. SHAN ◽

G. X. LIU ◽

W. J. LEE ◽

G. H. LEE ◽

I. S. KIM ◽

...

Keyword(s):

Thin Film ◽

Atomic Layer Deposition ◽

Atomic Layer ◽

High Plasma ◽

Plasma Power ◽

Layer Deposition ◽

Ga2o3 Thin Film ◽

High Plasma Power

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