atomic force microscopy scan
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High-speed Lissajous-scan atomic force microscopy: Scan pattern planning and control design issues

Review of Scientific Instruments ◽

10.1063/1.4725525 ◽

2012 ◽

Vol 83 (6) ◽

pp. 063701 ◽

Cited By ~ 90

Author(s):

A. Bazaei ◽

Yuen K. Yong ◽

S. O. Reza Moheimani

Keyword(s):

Atomic Force Microscopy ◽

High Speed ◽

Control Design ◽

Design Issues ◽

Force Microscopy ◽

Planning And Control ◽

Atomic Force ◽

And Control ◽

Scan Pattern ◽

Atomic Force Microscopy Scan

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