scanning electron microscope inspection
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Harmonized system of quality assessment for electronic components: basic specification: scanning electron microscope inspection of semiconductor dice

10.3403/00140153u ◽

2015 ◽

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Quality Assessment ◽

Electronic Components ◽

Scanning Electron Microscope Inspection ◽

Scanning Electron

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Effective Linewidth Measurement of 45-nm-Half-Pitch Ultraviolet Nanoimprint Lithography Patterns by Scanning Electron Microscope Inspection and Extremely Shallow Si Etching

Japanese Journal of Applied Physics ◽

10.1143/jjap.51.06fj09 ◽

2012 ◽

Vol 51 ◽

pp. 06FJ09 ◽

Cited By ~ 1

Author(s):

Kenta Suzuki ◽

Sung-Won Youn ◽

Qing Wang ◽

Hiroshi Hiroshima ◽

Yasushiro Nishioka

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Nanoimprint Lithography ◽

Linewidth Measurement ◽

Scanning Electron Microscope Inspection ◽

Scanning Electron

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Effective Linewidth Measurement of 45-nm-Half-Pitch Ultraviolet Nanoimprint Lithography Patterns by Scanning Electron Microscope Inspection and Extremely Shallow Si Etching

Japanese Journal of Applied Physics ◽

10.7567/jjap.51.06fj09 ◽

2012 ◽

Vol 51 (6S) ◽

pp. 06FJ09 ◽

Cited By ~ 8

Author(s):

Kenta Suzuki ◽

Sung-Won Youn ◽

Qing Wang ◽

Hiroshi Hiroshima ◽

Yasushiro Nishioka

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Nanoimprint Lithography ◽

Linewidth Measurement ◽

Scanning Electron Microscope Inspection ◽

Scanning Electron

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Damage to resist structures during scanning electron microscope inspection

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.583915 ◽

1987 ◽

Vol 5 (1) ◽

pp. 409 ◽

Cited By ~ 6

Author(s):

S. J. Erasmus

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Scanning Electron Microscope Inspection ◽

Scanning Electron

Download Full-text

Harmonized system of quality assessment for electronic components: basic specification: scanning electron microscope inspection of semiconductor dice

10.3403/00140153 ◽

1985 ◽

Keyword(s):

Electron Microscope ◽

Scanning Electron Microscope ◽

Quality Assessment ◽

Electronic Components ◽

Scanning Electron Microscope Inspection ◽

Scanning Electron

Download Full-text