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Characterization of Ultra Thin Oxynitride Formed by Radical Nitridation with Slot Plane Antenna Plasma

2005 ◽  
Vol 44 (3) ◽  
pp. 1232-1236 ◽  
Author(s):  
Takuya Sugawara ◽  
Seiji Matsuyama ◽  
Masaru Sasaki ◽  
Toshio Nakanishi ◽  
Shigemi Murakawa ◽  
...  
Keyword(s):  
Plane Antenna ◽  
Slot Plane

Characterization of Ultra Thin Oxynitride Formed by Radical Nitridation with Slot Plane Antenna Plasma

2002 ◽  
Author(s):  
Takuya Sugawara ◽  
Toshio Nakanishi ◽  
Masaru Sasaki ◽  
Shigenori Ozaki ◽  
Yoshihide Tada
Keyword(s):  
Plane Antenna ◽  
Slot Plane
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