Pull-In and Snap-Through Analysis of Electrically Actuated Viscoelastic Curved Microbeam

Microbeams are key elements in most of the micro-electromechanical systems (MEMS). Electromechanical instability of microbeams in turn plays an important role in their applications. The shape and mechanical properties of microbeams dictate their functional characteristics. Focusing on their instability-based working mechanism, one can appreciate that viscoelasticity of MEMS materials cannot be neglected. Consequently, the analysis of instability in viscoelastic curved microbeams is an essential demand. In this research, assuming a clamped-clamped initially curved microbeam, the effects of viscoelastic behavior on the snap-through and pull-in instabilities are investigated. The standard inelastic linear solid model is used for the simulation of viscoelastic behavior. Integrodifferential governing equation of the curved viscoelastic microbeam is obtained by assuming modified couple stress theory and using Hamilton’s principle. By applying the Galerkin method, the obtained governing equation is discretized, converted to a nonlinear differential equation, and solved by MATLAB software. Through a quasi-static analysis, the voltage and location of snap-through and pull-in instabilities are identified. The effects of different viscoelastic parameters including the creep moduli and relaxation coefficient upon the snap-through and pull-in instabilities are investigated. The effects of different short- and long-term creeping characteristics of viscoelastic microbeam are studied and discussed in detail.

On the Effects of Temperature and Relative Humidity on the Response of a MEMS Arch Resonator

In this paper, we present a comprehensive model to simulate the behavior of a general MEMS arch resonator under various thermal conditions. The model takes into account the changes in the microbeam’s parameters, air properties and the internal stresses due to temperature and humidity. The continuous, flexible, initially curved microbeam was excited linearly and nonlinearly around both its first and third modal natural frequencies. It was found that the mutual effects of temperature and humidity on air viscosity is amplified over four times when the microbeam is operated in the nonlinear regime. Furthermore, results showed that the relative humidity influence is more severe at higher values of the temperature. Finally, the microbeam’s frequency shift due to change in humidity increases when operating the microbeam at its third natural frequency compared to first natural frequency.

Snap-through buckling of initially curved microbeam subject to an electrostatic force

In this paper, the snap-through buckling of an initially curved microbeam subject to an electrostatic force, accounting for fringing field effect, is investigated. The general governing equations of the curved microbeam are developed using Euler–Bernoulli beam theory and used to develop a new criterion for the snap-through buckling of that beam. The size effect of the microbeam is accounted for using the modified couple stress theory, and intermolecular effects, such as van der Waals and Casimir forces, are also included in our snap-through formulations. The snap-through governing equations are solved using Galerkin decomposition of the deflection. The results of our work enable us to carefully characterize the snap-through behaviour of the initially curved microbeam. They further reveal the significant effect of the beam size, and to a much lesser extent, the effect of fringing field and intermolecular forces, upon the snap-through criterion for the curved beam.

Vibrations of a Slightly Curved Microbeam Resting on an Elastic Foundation with Nonideal Boundary Conditions

An investigation into the dynamic behavior of a slightly curved resonant microbeam having nonideal boundary conditions is presented. The model accounts for midplane stretching, an applied axial load, and a small AC harmonic force. The ends of the curved microbeam are on immovable simple supports and the microbeam is resting on a nonlinear elastic foundation. The forced vibration response of curved microbeam due to the small AC load is obtained analytically by means of direct application of the method of multiple scales (a perturbation method). The effects of the nonlinear elastic foundation as well as the effect of curvature on the vibrations of the microbeam are examined. It is found that the effect of curvature is of softening type. For sufficiently high values of the coefficients, the elastic foundation and the axial load may suppress the softening behavior resulting in hardening behavior of the nonlinearity. The frequencies and mode shapes obtained are compared with the ideal boundary conditions case and the differences between them are contrasted on frequency-response curves. The frequency response and nonlinear frequency curves obtained may provide a reference for the choice of reasonable resonant conditions, design, and industrial applications of such systems. Results may be beneficial for future experimental and theoretical works on MEMS.