Area-Scalable 109-Cycle-High-Endurance FeFET of Strontium Bismuth Tantalate Using a Dummy-Gate Process

Strontium bismuth tantalate (SBT) ferroelectric-gate field-effect transistors (FeFETs) with channel lengths of 85 nm were fabricated by a replacement-gate process. They had metal/ferroelectric/insulator/semiconductor stacked-gate structures of Ir/SBT/HfO2/Si. In the fabrication process, we prepared dummy-gate transistor patterns and then replaced the dummy substances with an SBT precursor. After forming Ir gate electrodes on the SBT, the whole gate stacks were annealed for SBT crystallization. Nonvolatility was confirmed by long stable data retention measured for 105 s. High erase-and-program endurance of the FeFETs was demonstrated for up to 109 cycles. By the new process proposed in this work, SBT-FeFETs acquire good channel-area scalability in geometry along with lithography ability.

Effect of V2O5 B-site substitution on the microstructure, Raman spectrum, and dielectric properties of SrBi2Ta2O9 ceramics

Strontium bismuth tantalate vanadate [SrBi2(Ta2−xVx)O9, SBTV] ceramics, which are bismuth-layered perovskite ferroelectrics, were synthesized through the solid-state reaction method. The effects of different sintering temperatures and V2O5 contents on the structure of the microstructure, Raman spectrum, and dielectric properties of the SBTV ceramics were investigated. As sintered at high temperature (980–1040 °C) and different V2O5 contents (x = 0.1 − x = 0.4), only disk-like grains of the SBTV ceramics were observed in the scanning electron micrographs. Preferential orientation of the crystals of the SBTV ceramics was confirmed through X-ray diffraction studies. The higher dielectric constant and Curie temperature of the SBTV ceramics compared with those of strontium bismuth tantalite (SrBi2Ta2O9, SBT) ceramics are ascribe to the partial replace of Ta5+ ions by V5+ ions in the B sites. The Curie–Weiss law and the modified Curie–Weiss law were used to discuss the normal-type or relaxor-type ferroelectric characteristic of the SBTV ceramics. The Ta5+ ion replaced by V5+ ion site in SBT ceramics to form SBTV ceramics exerted a pronounced effect on the BO6 mode, as demonstrated by Raman spectrum results.