annealing interface
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Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Thermal annealing, interface reaction, and lanthanum-based sub-nanometer EOT gate dielectrics

Vacuum ◽

10.1016/j.vacuum.2015.01.028 ◽

2015 ◽

Vol 118 ◽

pp. 2-7 ◽

Cited By ~ 7

Author(s):

Hei Wong ◽

Jieqiong Zhang ◽

Shurong Dong ◽

Kuniyuki Kakushima ◽

Hiroshi Iwai

Keyword(s):

Thermal Annealing ◽

Gate Dielectrics ◽

Interface Reaction ◽

Annealing Interface

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Effects of post deposition annealing, interface states and series resistance on electrical characteristics of HfO2 MOS capacitors

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-015-3492-3 ◽

2015 ◽

Vol 26 (11) ◽

pp. 8277-8284 ◽

Cited By ~ 20

Author(s):

Aysegul Kahraman ◽

Ercan Yilmaz ◽

Senol Kaya ◽

Aliekber Aktag

Keyword(s):

Series Resistance ◽

Interface States ◽

Electrical Characteristics ◽

Post Deposition Annealing ◽

Mos Capacitors ◽

Annealing Interface ◽

Post Deposition

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Research in Modified Simulated Annealing Interface Inversion Method

10.1190/nsgapc2013-158 ◽

2013 ◽

Author(s):

Qin Jingxin ◽

Guo Ziqi ◽

Liu Jianying ◽

Qiao Yanchao

Keyword(s):

Simulated Annealing ◽

Inversion Method ◽

Interface Inversion ◽

Annealing Interface

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