carbon mems
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Micromachines ◽  
2021 ◽  
Vol 12 (9) ◽  
pp. 1096
Author(s):  
Yujia Liu ◽  
Edmund Lau ◽  
Dario Mager ◽  
Marc J. Madou ◽  
Maziar Ghazinejad

It is generally accepted that inducing molecular alignment in a polymer precursor via mechanical stresses influences its graphitization during pyrolysis. However, our understanding of how variations of the imposed mechanics can influence pyrolytic carbon microstructure and functionality is inadequate. Developing such insight is consequential for different aspects of carbon MEMS manufacturing and applicability, as pyrolytic carbons are the main building blocks of MEMS devices. Herein, we study the outcomes of contrasting routes of stress-induced graphitization by providing a comparative analysis of the effects of compressive stress versus standard tensile treatment of PAN-based carbon precursors. The results of different materials characterizations (including scanning electron microscopy, Raman and X-ray photoelectron spectroscopies, as well as high-resolution transmission electron microscopy) reveal that while subjecting precursor molecules to both types of mechanical stresses will induce graphitization in the resulting pyrolytic carbon, this effect is more pronounced in the case of compressive stress. We also evaluated the mechanical behavior of three carbon types, namely compression-induced (CIPC), tension-induced (TIPC), and untreated pyrolytic carbon (PC) by Dynamic Mechanical Analysis (DMA) of carbon samples in their as-synthesized mat format. Using DMA, the elastic modulus, ultimate tensile strength, and ductility of CIPC and TIPC films are determined and compared with untreated pyrolytic carbon. Both stress-induced carbons exhibit enhanced stiffness and strength properties over untreated carbons. The compression-induced films reveal remarkably larger mechanical enhancement with the elastic modulus 26 times higher and tensile strength 2.85 times higher for CIPC compared to untreated pyrolytic carbon. However, these improvements come at the expense of lowered ductility for compression-treated carbon, while tension-treated carbon does not show any loss of ductility. The results provided by this report point to the ways that the carbon MEMS industry can improve and revise the current standard strategies for manufacturing and implementing carbon-based micro-devices.


2021 ◽  
Author(s):  
Ananya Gangadharan ◽  
Kali Suresh ◽  
Suresh Mamidi ◽  
Anil Daliprasad Pathak ◽  
Chandra Shekhar Sharma

The miniaturization of a lithium-ion battery has aspired in portable electronic devices and the possible way of implementation is by changing electrode configuration from the 2D system to 3D. Carbon...


2019 ◽  
Vol 1 (20) ◽  
pp. 1-11 ◽  
Author(s):  
Marc J. Madou ◽  
Rabih Zaouk ◽  
Chunlei Wang ◽  
B. Y. Park

2019 ◽  
Vol 4 (1) ◽  
pp. 83-92 ◽  
Author(s):  
Benjamin Y. Park ◽  
Rabih Zaouk ◽  
Chunlei Wang ◽  
Jim Zoval ◽  
Marc J. J. Madou
Keyword(s):  

2019 ◽  
Vol 5 (1) ◽  
Author(s):  
Aung Thiha ◽  
Fatimah Ibrahim ◽  
Shalini Muniandy ◽  
Marc J. Madou

AbstractCarbon micro- and nanoelectrodes fabricated by carbon microelectromechanical systems (carbon MEMS) are increasingly used in various biosensors and supercapacitor applications. Surface modification of as-produced carbon electrodes with oxygen functional groups is sometimes necessary for biofunctionalization or to improve electrochemical properties. However, conventional surface treatment methods have a limited ability for selective targeting of parts of a surface area for surface modification without using complex photoresist masks. Here, we report microplasma direct writing as a simple, low-cost, and low-power technique for site-selective plasma patterning of carbon MEMS electrodes with oxygen functionalities. In microplasma direct writing, a high-voltage source generates a microplasma discharge between a microelectrode tip and a target surface held at atmospheric pressure. In our setup, water vapor acts as an ionic precursor for the carboxylation and hydroxylation of carbon surface atoms. Plasma direct writing increases the oxygen content of an SU-8-derived pyrolytic carbon surface from ~3 to 27% while reducing the carbon-to-oxygen ratio from 35 to 2.75. Specifically, a microplasma treatment increases the number of carbonyl, carboxylic, and hydroxyl functional groups with the largest increase observed for carboxylic functionalities. Furthermore, water microplasma direct writing improves the hydrophilicity and the electrochemical performance of carbon electrodes with a contact-angle change from ~90° to ~20°, a reduction in the anodic peak to cathodic peak separation from 0.5 V to 0.17 V, and a 5-fold increase in specific capacitance from 8.82 mF∙cm−2 to 46.64 mF∙cm−2. The plasma direct-writing technology provides an efficient and easy-to-implement method for the selective surface functionalization of carbon MEMS electrodes for electrochemical and biosensor applications.


2019 ◽  
Vol 303 ◽  
pp. 323-328 ◽  
Author(s):  
Shulan Jiang ◽  
Feng Wang ◽  
Xianhua Tan ◽  
Jianbin Lin ◽  
Guanglan Liao ◽  
...  

2019 ◽  
Vol 29 (2) ◽  
pp. 027002
Author(s):  
Oscar Pilloni ◽  
Marc Madou ◽  
Doroteo Mendoza ◽  
Stephen Muhl ◽  
Laura Oropeza-Ramos
Keyword(s):  

2018 ◽  
Vol 28 (6) ◽  
pp. 065009 ◽  
Author(s):  
Noah Goshi ◽  
Elisa Castagnola ◽  
Maria Vomero ◽  
Calogero Gueli ◽  
Claudia Cea ◽  
...  

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