Processing Characteristics and Parametric Effects on Picosecond Laser Nanoscaled Patterning of Poly(methyl methacrylate)

Characteristics of picosecond laser processing for poly(methyl methacrylate) (PMMA) are studied in this text. Poly(methyl methacrylate) (PMMA) can be applied to micro- or nano-scale electronic devices. Short-pulsed laser is usually used for noncontact processing of nanoscale patterning of poly(methyl methacrylate) (PMMA). This study considers optical energy of laser to be transferred into decomposition energy of poly(methyl methacrylate) (PMMA). Using the condition of the energy balance at the decomposition interface, the variation of the ablation rate with the logarithm of the laser fluence is calculated for poly(methyl methacrylate) (PMMA) and agrees with the measured data. This study also discusses parametric effects of poly(methyl methacrylate) (PMMA) on the variation of the ablation rate with the logarithm of the laser fluence.