Влияние асимметрии расположения металлических масок на согласование нижнего электрода с высокочастотным генератором смещения при реактивно-ионном травлении массивных подложек

The effect of the degree of asymmetry in the arrangement of metal masks on the matching of the lower electrode with a high-frequency displacement generator during selective reactive-ion etching of massive substrates in plasma-forming gas mixtures based on freon-14 is studied theoretically and experimentally. Theoretically, the absence of the influence of the asymmetry of the mask location on the specific reactive power is shown. It is shown that at the edge of the substrate, especially with a mask, there is a sharp increase in the RF current density, which proves mainly the surface (end) nature of its flow. The influence of the mask location on the behavior of the electric charge density, which correlates with the distribution of the RF current density in the near-surface layer of the substrate, is established. No redistribution of the charge density of the chemically active plasma particles at the edge of the mask was detected. In accordance with the theoretical results obtained, it is experimentally shown that metal masks with a side length ratio of 36/0 mm reduce the power reflection coefficient within 5%.

Synthesis of bio-active titanium oxide coatings stimulated by electron-beam plasma

Advantages of the electron-beam plasma (EBP) for production of bioactive titanium oxide coatings were experimentally studied. The coatings were synthesized in EBP of oxygen on the surface of plane titanium substrates. A number of analytical techniques were used to characterize morphology, chemical composition, and structure of the synthesized titanium oxide. The analysis showed the titanium oxide (IV) in the rutile form to predominate in the coatings composition.The samples with plasmachemically synthesized TiOThe computer simulation of plasma-surface interaction was carried out to predict the plasma composition, to find the spatial distribution of the sample temperature, and to calculate the flows of the chemically active plasma particles bombarding the tube wall. The flows of atomic and singlet oxygen were found to be the most intensive and, therefore, these particles are likely to be responsible for the formation of the biocompatible TiO

Material Spraying Using Electromagnetically Accelerated Plasma Jet

In magneto-plasma-dynamic (MPD) arcjet generators, plasma is accelerated by electromagnetic body forces. The MPD arcjet generator can produce higher-velocity, higher-temperature, higher-density and larger-area plasmas than those of conventional thermal plasma torches. Two types of MPD arcjet generator were developed for applications to mullite, zirconia and titanium-nitride spraycoatings. The MPD spray process could successfully form dense, uniform and hard ceramic coatings. In titanium nitride reactive spraying, plasma diagnostic measurement and flowfield analysis were also carried out. A large amount of N and N+ was expected to be exhausted with a high velocity from the MPD generator. Both the electron temperature and the electron number density were kept high at a substrate position compared with those for conventional low-pressure thermal sprayings. A chemically active plasma with excited particles of N+, Ti, Ti+ and Ti2+ was considered to contribute to better titanium nitride coatings. All coating characteristics showed that the MPD arcjet generators had high potentials for ceramic spray coatings.