RF Sputter-Etching by Fluoro-Chloro-Hydrocarbon Gases
1974 ◽
Vol 13
(S1)
◽
pp. 435
◽
1984 ◽
Vol 42
◽
pp. 662-663
2018 ◽
Vol 6
(32)
◽
pp. 40-45
Keyword(s):
1988 ◽
Vol 111
(6)
◽
pp. 567-576
◽
2001 ◽
pp. 159-166
◽
Keyword(s):
Keyword(s):
2020 ◽
Vol 14
(1)
◽
pp. 87-96
◽
Keyword(s):