Electron collision cross sections of CHF3and electron transport in CHF3and CHF3–Ar mixtures

Satoru Kawaguchi; Kohki Satoh; Hidenori Itoh

doi:10.7567/jjap.54.01ac01

Electron collision cross sections of CHF3and electron transport in CHF3and CHF3–Ar mixtures

Japanese Journal of Applied Physics ◽

10.7567/jjap.54.01ac01 ◽

2014 ◽

Vol 54 (1S) ◽

pp. 01AC01 ◽

Cited By ~ 2

Author(s):

Satoru Kawaguchi ◽

Kohki Satoh ◽

Hidenori Itoh

Keyword(s):

Electron Transport ◽

Cross Sections ◽

Electron Collision ◽

Collision Cross Sections

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Electron Collision Cross Sections for C3F8 Molecule from Electron Transport Coefficients in C3F8-Ar Mixtures

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms1990.118.7-8_868 ◽

1998 ◽

Vol 118 (7-8) ◽

pp. 868-873 ◽

Cited By ~ 1

Author(s):

Byoung-Hoon Jeon ◽

Yoshiharu Nakamura

Keyword(s):

Electron Transport ◽

Cross Sections ◽

Transport Coefficients ◽

Electron Collision ◽

Collision Cross Sections ◽

Electron Transport Coefficients

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Electron Collision Cross Sections for the TRIES Molecule and Electron Transport Coefficients in TRIES-Ar and TRIES-O2 Mixtures

Journal of the Korean Physical Society ◽

10.3938/jkps.73.1855 ◽

2018 ◽

Vol 73 (12) ◽

pp. 1855-1862 ◽

Cited By ~ 1

Author(s):

Phan Thi Tuoi ◽

Do Anh Tuan ◽

Pham Xuan Hien

Keyword(s):

Electron Transport ◽

Cross Sections ◽

Transport Coefficients ◽

Electron Collision ◽

Collision Cross Sections ◽

Electron Transport Coefficients

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Electron Collision Cross Sections for the Cl2 Molecule from Electron Transport Coefficients

Journal of the Physical Society of Japan ◽

10.1143/jpsj.80.084301 ◽

2011 ◽

Vol 80 (8) ◽

pp. 084301 ◽

Cited By ~ 7

Author(s):

Do Anh Tuan ◽

Byung-Hoon Jeon

Keyword(s):

Electron Transport ◽

Cross Sections ◽

Transport Coefficients ◽

Electron Collision ◽

Collision Cross Sections ◽

Electron Transport Coefficients

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Electron collision cross sections for the TMS molecule and electron transport coefficients in TMS-Ar and TMS-O2 mixtures

Journal of the Korean Physical Society ◽

10.3938/jkps.61.62 ◽

2012 ◽

Vol 61 (1) ◽

pp. 62-72 ◽

Cited By ~ 7

Author(s):

Pham Xuan Hien ◽

Do Anh Tuan ◽

Byung-Hoon Jeon

Keyword(s):

Electron Transport ◽

Cross Sections ◽

Transport Coefficients ◽

Electron Collision ◽

Collision Cross Sections ◽

Electron Transport Coefficients

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Electron Collision Cross Sections for the Tetraethoxysilane Molecule and Electron Transport Coefficients in Tetraethoxysilane–O2 and Tetraethoxysilane–Ar Mixtures

Journal of the Physical Society of Japan ◽

10.1143/jpsj.81.064301 ◽

2012 ◽

Vol 81 (6) ◽

pp. 064301 ◽

Cited By ~ 9

Author(s):

Do Anh Tuan ◽

Byung-Hoon Jeon

Keyword(s):

Electron Transport ◽

Cross Sections ◽

Transport Coefficients ◽

Electron Collision ◽

Collision Cross Sections ◽

Electron Transport Coefficients

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Mechanisms of electron transport in electrical discharges and electron collision cross sections

Advances In Atomic, Molecular, and Optical Physics ◽

10.1016/s1049-250x(01)80027-6 ◽

2001 ◽

pp. 1-32 ◽

Cited By ~ 5

Author(s):

Hiroshi Tanaka ◽

Osamu Sueoka

Keyword(s):

Electron Transport ◽

Cross Sections ◽

Electron Collision ◽

Electrical Discharges ◽

Collision Cross Sections

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Electron Collision Cross Sections for the BF3Molecule and Electron Transport Coefficients in BF3–Ar and BF3–SiH4Mixtures

Journal of the Physical Society of Japan ◽

10.7566/jpsj.82.034301 ◽

2013 ◽

Vol 82 (3) ◽

pp. 034301 ◽

Cited By ~ 11

Author(s):

Pham Xuan Hien ◽

Byung-Hoon Jeon ◽

Do Anh Tuan

Keyword(s):

Electron Transport ◽

Cross Sections ◽

Transport Coefficients ◽

Electron Collision ◽

Collision Cross Sections ◽

Electron Transport Coefficients

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Anisotropic low energy electron collision cross sections for methane derived from transport coefficients

Journal of Physics B Atomic Molecular and Optical Physics ◽

10.1088/0953-4075/24/22/018 ◽

1991 ◽

Vol 24 (22) ◽

pp. 4809-4820 ◽

Cited By ~ 38

Author(s):

B Schmidt

Keyword(s):

Cross Sections ◽

Transport Coefficients ◽

Low Energy ◽

Energy Electron ◽

Electron Collision ◽

Collision Cross Sections ◽

Low Energy Electron

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Electron collision cross sections for tetraethoxysilane

Journal of Applied Physics ◽

10.1063/1.1491024 ◽

2002 ◽

Vol 92 (3) ◽

pp. 1663-1667 ◽

Cited By ~ 23

Author(s):

W. Lowell Morgan ◽

Carl Winstead ◽

Vincent McKoy

Keyword(s):

Cross Sections ◽

Electron Collision ◽

Collision Cross Sections

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Electron Collision Cross Sections for Processing Plasma Gases from Swarm and Discharge Data

Nonequilibrium Effects in Ion and Electron Transport ◽

10.1007/978-1-4613-0661-0_8 ◽

1990 ◽

pp. 121-142 ◽

Cited By ~ 1

Author(s):

Larry E. Kline

Keyword(s):

Cross Sections ◽

Electron Collision ◽

Discharge Data ◽

Collision Cross Sections

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