scholarly journals Diagnosis of capacitively coupled plasma driven by pulse-modulated 27.12 MHz by using an emissive probe

2020 ◽  
Vol 69 (8) ◽  
pp. 085201
Author(s):  
Yu Zhou ◽  
Li-Yang Cao ◽  
Xiao-Ping Ma ◽  
Li-Li Deng ◽  
Yu Xin
Keyword(s):  
Capacitively Coupled ◽  
Capacitively Coupled Plasma ◽  
Emissive Probe

Functional separation of biasing and sustaining voltages in two-frequency capacitively coupled plasma

2000 ◽  
Vol 77 (4) ◽  
pp. 489-491 ◽  
Author(s):  
T. Kitajima ◽  
Y. Takeo ◽  
Z. Lj. Petrović ◽  
T. Makabe
Keyword(s):  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

scholarly journals Modeling of Perpendicularly Driven Dual-Frequency Capacitively Coupled Plasma

2016 ◽  
Vol 18 (2) ◽  
pp. 143-146
Author(s):  
Hongyu Wang ◽  
Wei Jiang ◽  
Peng Sun ◽  
Shuangyun Zhao ◽  
Yang Li
Keyword(s):  
Dual Frequency ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

scholarly journals Spatial Temperature Profile in a Magnetised Capacitively Coupled Discharge

2018 ◽  
Vol 16 (6) ◽  
pp. 385-390
Author(s):  
Shikha BINWAL ◽  
Jay K JOSHI ◽  
Shantanu Kumar KARKARI ◽  
Predhiman Krishan KAW ◽  
Lekha NAIR ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Electron Temperature ◽  
Temperature Profile ◽  
Transverse Magnetic ◽  
Capacitively Coupled ◽  
Particle In Cell ◽  
Cell Simulation ◽  
Higher Temperature ◽  
The Magnetic Field ◽  
Emissive Probe

A floating emissive probe has been used to obtain the spatial electron temperature (Te) profile in a 13.56 MHz parallel plate capacitive coupled plasma. The effect of an external transverse magnetic field and pressure on the electron temperature profile has been discussed. In the un-magnetised case, the bulk region of the plasma has a uniform Te. Upon application of the magnetic field, the Te profile becomes non-uniform and skewed.  With increase in pressure, there is an overall reduction in electron temperature. The regions adjacent to the electrodes witnessed a higher temperature than the bulk for both cases. The emissive probe results have also been compared with particle-in-cell simulation results for the un-magnetised case.

scholarly journals Influence of electrodes area ratios and the discharge volume in RF capacitively coupled plasma

2019 ◽  
Vol 11 (20) ◽  
pp. 1-8
Author(s):  
Moyad Abdullah Ahmad
Keyword(s):  
Glow Discharge ◽  
Cone Angle ◽  
Experimental Results ◽  
Rf Power ◽  
Capacitively Coupled ◽  
Discharge Volume ◽  
Capacitively Coupled Plasma ◽  
Harmonic Distortions

Experimental results on harmonic distortions in 13.56 MHz RF Argon glow discharge using different grounded electrodes areas and electrodes spacing are presented. The experiment is carried out at four pressure values. RF power values used are between 20 and 90 watts. The results indicate significant increase in distortions at two specific values of the cone angle enclosing the two electrodes within its geometrical volume. The computation of the cone head angle gave the symmetry discharge or asymmetry as well as when the angle is small the condition is near symmetry discharge associated with decrease in the nonlinearity.

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