scholarly journals Characterization on the temperature of radio frequency argon capacitive discharge mode transition at atmospheric pressure

2011 ◽  
Vol 60 (2) ◽  
pp. 025207
Author(s):  
Guo Qing-Chao ◽  
Zhang Jia-Liang ◽  
Liu Li-Ying ◽  
Wang De-Zhen
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Mode Transition ◽  
Discharge Mode ◽  
Capacitive Discharge

Capacitive discharge mode transition in moderate and atmospheric pressure

2009 ◽  
Vol 9 (1) ◽  
pp. 274-277 ◽  
Author(s):  
Se Youn Moon ◽  
J.K. Rhee ◽  
D.B. Kim ◽  
B.M. Gweon ◽  
W. Choe
Keyword(s):  
Atmospheric Pressure ◽  
Mode Transition ◽  
Discharge Mode ◽  
Capacitive Discharge

Effect of Aluminum Nitride on Discharge Mode Transition in Atmospheric Pressure He/O2 DBD

2018 ◽  
Vol 46 (4) ◽  
pp. 888-894 ◽  
Author(s):  
Hai-Bao Mu ◽  
Yi-Hao Guo ◽  
Cong-Wei Yao ◽  
Zhan-Hao Jia ◽  
Zheng-Shi Chang ◽  
...  
Keyword(s):  
Aluminum Nitride ◽  
Atmospheric Pressure ◽  
Mode Transition ◽  
Discharge Mode

The discharge mode transition and O(5p1) production mechanism of pulsed radio frequency capacitively coupled plasma

2012 ◽  
Vol 101 (4) ◽  
pp. 043705 ◽  
Author(s):  
X. Y. Liu ◽  
J. T. Hu ◽  
J. H. Liu ◽  
Z. L. Xiong ◽  
D. W. Liu ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Mode Transition ◽  
Production Mechanism ◽  
Discharge Mode ◽  
Capacitively Coupled ◽  
Capacitively Coupled Plasma

Hybrid model of atmospheric pressure Ar/O2/TiCl4 radio-frequency capacitive discharge for TiO2 deposition

2014 ◽  
Vol 115 (18) ◽  
pp. 183302 ◽  
Author(s):  
A. Leblanc ◽  
Ke Ding ◽  
M. A. Lieberman ◽  
De Xin Wang ◽  
Jing Zhang ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Hybrid Model ◽  
Atmospheric Pressure ◽  
Capacitive Discharge
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