Hybrid model of atmospheric pressure Ar/O2/TiCl4 radio-frequency capacitive discharge for TiO2 deposition

2014 ◽  
Vol 115 (18) ◽  
pp. 183302 ◽  
Author(s):  
A. Leblanc ◽  
Ke Ding ◽  
M. A. Lieberman ◽  
De Xin Wang ◽  
Jing Zhang ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Hybrid Model ◽  
Atmospheric Pressure ◽  
Capacitive Discharge

The driving frequency effects on the atmospheric pressure corona jet plasmas from low frequency to radio frequency

2011 ◽  
Vol 18 (4) ◽  
pp. 043503 ◽  
Author(s):  
Dan Bee Kim ◽  
H. Jung ◽  
B. Gweon ◽  
S. Y. Moon ◽  
J. K. Rhee ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Atmospheric Pressure ◽  
Low Frequency ◽  
Driving Frequency ◽  
Frequency Effects
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