scholarly journals Influence of excitation frequency on the growth properties of nanocrystalline silicon films with high hydrogen dilution

2010 ◽  
Vol 59 (10) ◽  
pp. 7378
Author(s):  
Song Jie ◽  
Guo Yan-Qing ◽  
Wang Xiang ◽  
Ding Hong-Lin ◽  
Huang Rui
2003 ◽  
Vol 762 ◽  
Author(s):  
Z.B. Zhou ◽  
G.M. Hadi ◽  
R.Q. Cui ◽  
Z.M. Ding ◽  
G. Li

AbstractBased on a small set of selected publications on the using of nanocrystalline silicon films (nc-Si) for solar cell from 1997 to 2001, this paper reviews the application of nc-Si films as intrinsic layers in p-i-n solar cells. The new structure of nc-Si films deposited at high chamber pressure and high hydrogen dilution have characters of nanocrystalline grains with dimension about several tens of nanometer embedded in matrix of amorphous tissue and a high volume fraction of crystallinity (60~80%). The new nc-Si material have optical gap of 1.89 eV. The efficiency of this single junction solar cell reaches 8.7%. This nc-Si layer can be used not only as an intrinsic layer and as a p-type layer. Also nanocrystalline layer may be used as a seed layer for the growth of polycrystalline Si films at a low temperature.We used single ion beam sputtering methods to synthesize nanocrystalline silicon films successfully. The films were characterized with the technique of X-ray diffraction, Atomic Force Micrographs. We found that the films had a character of nc-amorphous double phase structure. Conductivity test at different temperatures presented the transportation of electrons dominated by different mechanism within different temperature ranges. Photoconductivity gains of the material were obtained in our recent investigation.


2010 ◽  
Vol 663-665 ◽  
pp. 1171-1174 ◽  
Author(s):  
Yan Qing Guo ◽  
Rui Huang ◽  
Jie Song ◽  
Xiang Wang ◽  
Yi Xiong Zhang

Nanocrystalline silicon films have been fabricated from SiH4 diluted with H2 in very high frequency (40.68 MHz) plasma enhanced chemical vapor deposition system at low temperatures (250oC). The influence of pressure on the structural properties of nanocrystalline silicon films has been investigated. The experimental results reveal that a very high hydrogen dilution is needed to crystallize the film grown at high pressure. If the hydrogen dilution is not high enough, the film could also be crystallized through lowering the pressure. Furthermore, the crystallinity and grain size increase with decreasing the pressure. These results could be attributed to the increase of ion bombardment energy and the higher atomic hydrogen flux toward the growing film surface at lower pressures.


2012 ◽  
Vol 41 (8) ◽  
pp. 927-931
Author(s):  
于威 YU Wei ◽  
詹小舟 ZHAN Xiao-zhou ◽  
李彬 LI Bin ◽  
徐艳梅 XU Yan-mei ◽  
李晓苇 LI Xiao-wei ◽  
...  

2011 ◽  
Author(s):  
M. M. Kamble ◽  
M. R. Pramod ◽  
V. S. Waman ◽  
A. M. Funde ◽  
V. G. Sathe ◽  
...  

2004 ◽  
Vol 455-456 ◽  
pp. 532-535 ◽  
Author(s):  
Leandro Raniero ◽  
Rodrigo Martins ◽  
Hugo Águas ◽  
S. Zang ◽  
Isabel Ferreira ◽  
...  

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