Distributed electron cyclotron resonance plasma immersion for large area ion implantation (invited)

1998 ◽  
Vol 69 (2) ◽  
pp. 831-836 ◽  
Author(s):  
F. Le Coeur ◽  
T. Lagarde ◽  
J. Pelletier ◽  
Y. Arnal ◽  
R. Burke ◽  
...  
Keyword(s):  
Ion Implantation ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Large Area ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

scholarly journals Large-Area Electron Cyclotron Resonance Plasma Source with Permanent Magnets. (2). Etching Characteristics.

Shinku ◽  
1994 ◽  
Vol 37 (3) ◽  
pp. 316-318
Author(s):  
Takashi INOUE ◽  
Tadayoshi OGAWA ◽  
Wataru MIYAZAWA ◽  
Yukio OKAMOTO ◽  
Shoji DEN ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Permanent Magnets ◽  
Electron Cyclotron Resonance ◽  
Plasma Source ◽  
Electron Cyclotron ◽  
Large Area ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma

scholarly journals Large-Area Electron Cyclotron Resonance Plasma Source with Permanent Magnets. (1). Plasma Characteristics.

Shinku ◽  
1994 ◽  
Vol 37 (3) ◽  
pp. 312-315
Author(s):  
Takashi INOUE ◽  
Tadayoshi OGAWA ◽  
Wataru MIYAZAWA ◽  
Yukio OKAMOTO ◽  
Shoji DEN ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Permanent Magnets ◽  
Electron Cyclotron Resonance ◽  
Plasma Source ◽  
Electron Cyclotron ◽  
Large Area ◽  
Electron Cyclotron Resonance Plasma ◽  
Plasma Characteristics ◽  
Resonance Plasma

Large-Area Electron Cyclotron Resonance Plasma Source with Permanent Magnets

1993 ◽  
Vol 32 (Part 2, No. 11A) ◽  
pp. L1635-L1637 ◽  
Author(s):  
Noriyoshi Shida ◽  
Takashi Inoue ◽  
Hideki Kokai ◽  
Yuichi Sakamoto ◽  
Wataru Miyazawa ◽  
...  
Keyword(s):  
Cyclotron Resonance ◽  
Permanent Magnets ◽  
Electron Cyclotron Resonance ◽  
Plasma Source ◽  
Electron Cyclotron ◽  
Large Area ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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