scholarly journals CONTROL OF THE SURFACE REACTIONS DURING THE LOW-TEMPERATURE GROWTH OF POLYCRYSTALLINE SILICON FILMS

2001 ◽  
Vol 50 (4) ◽  
pp. 779
Author(s):  
HE DE-YAN
Keyword(s):  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Surface Reactions ◽  
Silicon Films ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Polycrystalline Silicon Films

scholarly journals Low Temperature Growth of Polycrystalline Silicon Films by RF Sputtering Method(1st Report).

1995 ◽  
Vol 61 (6) ◽  
pp. 829-833
Author(s):  
Hiroaki KAKIUCHI ◽  
Hideaki KAWABE ◽  
Kumayasu YOSHII ◽  
Kiyoshi YASUTAKE ◽  
Akihiro TAKEUCHI ◽  
...  
Keyword(s):  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Rf Sputtering ◽  
Silicon Films ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Polycrystalline Silicon Films

scholarly journals Control of grain size during low-temperature growth of polycrystalline silicon films

2004 ◽  
Vol 53 (11) ◽  
pp. 3950
Author(s):  
Huang Rui ◽  
Lin Xuan-Ying ◽  
Yu Yun-Peng ◽  
Lin Kui-Xun ◽  
Yao Ruo-He ◽  
...  
Keyword(s):  
Grain Size ◽  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Silicon Films ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Polycrystalline Silicon Films

Effect of hydrogen on the low-temperature growth of polycrystalline silicon film deposited by SiCl4/H2

2006 ◽  
Vol 513 (1-2) ◽  
pp. 380-384 ◽  
Author(s):  
Rui Huang ◽  
Xuanying Lin ◽  
Wenyong Huang ◽  
Ruohe Yao ◽  
Yunpeng Yu ◽  
...  
Keyword(s):  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Silicon Film ◽  
Temperature Growth ◽  
Low Temperature Growth ◽  
Polycrystalline Silicon Film
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