PROBE DIAGNOSTICS OF THE ELECTRON ENERGY DISTRIBUTION FUNCTION IN A LOW PRESSURE RF PLASMA

ZHU WEN-HAO;  ZHU NAN-QIANG;  CHEN YUE-SHAN

doi:10.7498/aps.38.236

PROBE DIAGNOSTICS OF THE ELECTRON ENERGY DISTRIBUTION FUNCTION IN A LOW PRESSURE RF PLASMA

Acta Physica Sinica ◽

10.7498/aps.38.236 ◽

1989 ◽

Vol 38 (2) ◽

pp. 236

Author(s):

ZHU WEN-HAO ◽

ZHU NAN-QIANG ◽

CHEN YUE-SHAN

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Rf Plasma ◽

Electron Energy Distribution ◽

Probe Diagnostics

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Measurements on the electron-energy distribution function in a low-pressure cesium discharge

Physica ◽

10.1016/0031-8914(72)90050-x ◽

1972 ◽

Vol 57 (4) ◽

pp. 624-627 ◽

Cited By ~ 1

Author(s):

A.J. Postma ◽

K. Wiesemann

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Electron energy distribution function in low-pressure complex plasmas

Journal of Plasma Physics ◽

10.1017/s002237780400354x ◽

2005 ◽

Vol 71 (2) ◽

pp. 217-224 ◽

Cited By ~ 14

Author(s):

K. OSTRIKOV ◽

I. DENYSENKO ◽

M. Y. YU ◽

S. XU

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Complex Plasmas

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Measurements on the electron-energy distribution function in a low-pressure cesium discharge

Physica ◽

10.1016/0031-8914(70)90200-4 ◽

1970 ◽

Vol 49 (1) ◽

pp. 77-91 ◽

Cited By ~ 8

Author(s):

A.J. Postma

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Effect of driving frequency on the electron energy distribution function and electron-sheath interaction in a low pressure capacitively coupled plasma

Physics of Plasmas ◽

10.1063/1.4967356 ◽

2016 ◽

Vol 23 (11) ◽

pp. 110701 ◽

Cited By ~ 14

Author(s):

S. Sharma ◽

N. Sirse ◽

P. K. Kaw ◽

M. M. Turner ◽

A. R. Ellingboe

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Driving Frequency ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Electron Energy Distribution Function measurements in a low pressure expanding plasma jet

2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2013.6633366 ◽

2013 ◽

Author(s):

Rodrigo S. Pessoa ◽

David Toneli ◽

Marisa Roberto ◽

Gilberto Petraconi ◽

Homero Santiago Maciel

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Plasma Jet ◽

Low Pressure ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Low-Pressure PECVD of Nanoparticles in Carbon Thin Films from Ar/H2/C2H2 Plasmas: Synthesis of Films and Analysis of the Electron Energy Distribution Function

Chemical Vapor Deposition ◽

10.1002/cvde.200606554 ◽

2007 ◽

Vol 13 (6-7) ◽

pp. 326-334 ◽

Cited By ~ 6

Author(s):

M. Camero ◽

F. J. Gordillo-Vázquez ◽

C. Gómez-Aleixandre

Keyword(s):

Thin Films ◽

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Carbon Thin Films

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Electron energy distribution function measurements in a low pressure expanding jet plasma

2013 19th IEEE Pulsed Power Conference (PPC) ◽

10.1109/ppc.2013.6627467 ◽

2013 ◽

Author(s):

R. S. Pessoa ◽

D. A. Toneli ◽

M. Roberto ◽

G. Petraconi ◽

H. S. Maciel

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Jet Plasma

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Measurement of Electron Energy Distribution Function in a Low-Pressure rf Discharge Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.31.1503 ◽

1992 ◽

Vol 31 (Part 1, No. 5A) ◽

pp. 1503-1504 ◽

Cited By ~ 4

Author(s):

Shinya Yagura ◽

Yoshihiro Okuno ◽

Yasunori Ohtsu ◽

Hiroharu Fujita

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Discharge Plasma ◽

Low Pressure ◽

Energy Distribution Function ◽

Rf Discharge ◽

Electron Energy Distribution

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Spatial evolution of the electron energy distribution function in a low-pressure capacitively coupled plasma containing argon and krypton

Plasma Sources Science and Technology ◽

10.1088/0963-0252/21/4/045009 ◽

2012 ◽

Vol 21 (4) ◽

pp. 045009 ◽

Cited By ~ 3

Author(s):

Xi-Ming Zhu ◽

Wen-Cong Chen ◽

Jiang Li ◽

Zhi-Wen Cheng ◽

Yi-Kang Pu

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Spatial Evolution ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Capacitively Coupled Plasma

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Electron energy distribution function in Ne low pressure discharge

Czechoslovak Journal of Physics ◽

10.1007/bf01587240 ◽

1973 ◽

Vol 23 (2) ◽

pp. 171-175 ◽

Cited By ~ 4

Author(s):

V. Řezáčová

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Low Pressure ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Pressure Discharge

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