Low-Pressure PECVD of Nanoparticles in Carbon Thin Films from Ar/H2/C2H2 Plasmas: Synthesis of Films and Analysis of the Electron Energy Distribution Function

2007 ◽  
Vol 13 (6-7) ◽  
pp. 326-334 ◽  
Author(s):  
M. Camero ◽  
F. J. Gordillo-Vázquez ◽  
C. Gómez-Aleixandre
Keyword(s):  
Thin Films ◽  
Distribution Function ◽  
Energy Distribution ◽  
Electron Energy ◽  
Electron Energy Distribution Function ◽  
Low Pressure ◽  
Energy Distribution Function ◽  
Electron Energy Distribution ◽  
Carbon Thin Films
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