ELECTRON ENERGY DISTRIBUTION AND TRANSPORT COEFFICIENTS IN ELECTRICALLY EXCITED KrF AND ArF
Keyword(s):
1990 ◽
Vol 23
(4)
◽
pp. 415-421
◽
Keyword(s):
1970 ◽
Vol 3
(11)
◽
pp. 1544-1551
◽
1996 ◽
Vol 16
(2)
◽
pp. 153-171
◽
1979 ◽
Vol 40
(C7)
◽
pp. C7-191-C7-192
2019 ◽
Vol 7
(3)
◽
pp. 97-104
1973 ◽
Vol 93
(3)
◽
pp. 28-34
◽
1992 ◽
Vol 12
(3)
◽
pp. 237-260
◽
2009 ◽
Vol 18
(3)
◽
pp. 034021
◽