Monte Carlo simulation of electron energy distribution functions and transport coefficients in weakly ionized gas

T. Makabe; T. Goto; T. Mori

doi:10.1002/eej.4390930304

Monte Carlo simulation of electron energy distribution functions and transport coefficients in weakly ionized gas

Electrical Engineering in Japan ◽

10.1002/eej.4390930304 ◽

1973 ◽

Vol 93 (3) ◽

pp. 28-34 ◽

Cited By ~ 1

Author(s):

T. Makabe ◽

T. Goto ◽

T. Mori

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Energy Distribution ◽

Electron Energy ◽

Transport Coefficients ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Ionized Gas ◽

Weakly Ionized ◽

Energy Distribution Functions

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Monte Carlo Simulation of Electron Energy Distribution functions and Transport Goefficients in Weakly Ionized Gas

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms1972.93.229 ◽

1973 ◽

Vol 93 (6) ◽

pp. 229-236 ◽

Cited By ~ 1

Author(s):

T. MAKABE ◽

T. GOTO ◽

T. MORI

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Energy Distribution ◽

Electron Energy ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Ionized Gas ◽

Weakly Ionized ◽

Energy Distribution Functions

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Capacitive RF discharges modelled by particle-in-cell Monte Carlo simulation. II. Comparisons with laboratory measurements of electron energy distribution functions

Plasma Sources Science and Technology ◽

10.1088/0963-0252/2/4/007 ◽

1993 ◽

Vol 2 (4) ◽

pp. 273-278 ◽

Cited By ~ 83

Author(s):

V Vahedi ◽

C K Birdsall ◽

M A Lieberman ◽

G DiPeso ◽

T D Ronhlien

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Energy Distribution ◽

Electron Energy ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Laboratory Measurements ◽

Particle In Cell ◽

Rf Discharges ◽

Energy Distribution Functions

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Kinetic and Monte Carlo Approaches to Solve Boltzmann Equation for the Electron Energy Distribution Functions

Fundamental Aspects of Plasma Chemical Physics - Springer Series on Atomic, Optical, and Plasma Physics ◽

10.1007/978-1-4419-8185-1_4 ◽

2016 ◽

pp. 79-111

Author(s):

Mario Capitelli ◽

Roberto Celiberto ◽

Gianpiero Colonna ◽

Fabrizio Esposito ◽

Claudine Gorse ◽

...

Keyword(s):

Monte Carlo ◽

Boltzmann Equation ◽

Energy Distribution ◽

Electron Energy ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Energy Distribution Functions

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Electron energy distribution functions and transport coefficients in helium and neon

Journal of Physics B Atomic and Molecular Physics ◽

10.1088/0022-3700/3/11/015 ◽

1970 ◽

Vol 3 (11) ◽

pp. 1544-1551 ◽

Cited By ~ 18

Author(s):

M H Hughes

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Transport Coefficients ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Energy Distribution Functions

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Electron energy distribution functions and rate and transport coefficients of H2/H/CH4 reactive plasmas for diamond film deposition

Plasma Chemistry and Plasma Processing ◽

10.1007/bf01570175 ◽

1996 ◽

Vol 16 (2) ◽

pp. 153-171 ◽

Cited By ~ 20

Author(s):

M. Capitelli ◽

G. Colonna ◽

K. Hassouni ◽

A. Gicquel

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Diamond Film ◽

Transport Coefficients ◽

Distribution Functions ◽

Film Deposition ◽

Electron Energy Distribution ◽

Energy Distribution Functions

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Transmission of ∼10 keV electron beams through thin ceramic foils: Measurements and Monte Carlo simulations of electron energy distribution functions

The European Physical Journal D ◽

10.1140/epjd/e2008-00121-4 ◽

2008 ◽

Vol 48 (3) ◽

pp. 383-388 ◽

Cited By ~ 23

Author(s):

A. Morozov ◽

T. Heindl ◽

C. Skrobol ◽

J. Wieser ◽

R. Krücken ◽

...

Keyword(s):

Monte Carlo ◽

Energy Distribution ◽

Monte Carlo Simulations ◽

Electron Energy ◽

Electron Beams ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Energy Distribution Functions

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Higher‐order sampling strategies in Monte Carlo simulations of electron energy distribution functions in plasmas

Journal of Applied Physics ◽

10.1063/1.356053 ◽

1994 ◽

Vol 75 (8) ◽

pp. 3785-3788 ◽

Cited By ~ 11

Author(s):

Peter L. G. Ventzek ◽

Kazutaka Kitamori

Keyword(s):

Monte Carlo ◽

Energy Distribution ◽

Monte Carlo Simulations ◽

Electron Energy ◽

Higher Order ◽

Distribution Functions ◽

Sampling Strategies ◽

Electron Energy Distribution ◽

Energy Distribution Functions

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A parametric study of electron energy distribution functions and rate and transport coefficients in nonequilibrium helium plasmas

Plasma Chemistry and Plasma Processing ◽

10.1007/bf01447024 ◽

1992 ◽

Vol 12 (3) ◽

pp. 237-260 ◽

Cited By ~ 34

Author(s):

G. Capriati ◽

G. Colonna ◽

C. Gorse ◽

M. Capitelli

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Parametric Study ◽

Transport Coefficients ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Energy Distribution Functions

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Electron energy distribution functions and transport coefficients relevant for air plasmas in the troposphere: impact of humidity and gas temperature

Plasma Sources Science and Technology ◽

10.1088/0963-0252/18/3/034021 ◽

2009 ◽

Vol 18 (3) ◽

pp. 034021 ◽

Cited By ~ 19

Author(s):

F J Gordillo-Vázquez ◽

Z Donkó

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Transport Coefficients ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Gas Temperature ◽

Air Plasmas ◽

Energy Distribution Functions

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Electron energy distribution functions relevant for weakly ionized SiH4–H2 plasma

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/ab622c ◽

2020 ◽

Vol 53 (11) ◽

pp. 115201

Author(s):

Bin Zhang ◽

Xiaobing Zhang

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Weakly Ionized ◽

Energy Distribution Functions

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