scholarly journals Surface Morphology and Tribological Properties of Nanoscale (Ti, Al, Si, C)N Multilayer Coatings Deposited by Reactive Magnetron Sputtering

2018 ◽  
Author(s):  
Mei Wang ◽  
Shojiro Miyake
Keyword(s):  
Surface Morphology ◽  
Magnetron Sputtering ◽  
Tribological Properties ◽  
Reactive Magnetron Sputtering ◽  
Multilayer Coatings ◽  
Reactive Magnetron

Mechanical and tribological properties of CNx films deposited by reactive magnetron sputtering

Wear ◽  
2001 ◽  
Vol 248 (1-2) ◽  
pp. 55-64 ◽  
Author(s):  
E. Broitman ◽  
N. Hellgren ◽  
O. Wänstrand ◽  
M.P. Johansson ◽  
T. Berlind ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Tribological Properties ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Mechanical And Tribological Properties ◽  
Cnx Films
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