scholarly journals Non-Contact Measurement of Thickness Uniformity of Chemically Etched Si Membranes by Fiber-Optic Low-Coherence Interferometry

Author(s):  
Zoran Djinovic ◽  
Milos Tomic ◽  
Lazo Manojlovic ◽  
Zarko Lazic ◽  
Milce Smiljanic
2018 ◽  
Vol 411 ◽  
pp. 27-32 ◽  
Author(s):  
Y. Liu ◽  
R. Strum ◽  
D. Stiles ◽  
C. Long ◽  
A. Rakhman ◽  
...  

2008 ◽  
Vol 154 (1) ◽  
pp. 107-111 ◽  
Author(s):  
M. Jedrzejewska-Szczerska ◽  
R. Bogdanowicz ◽  
M. Gnyba ◽  
R. Hypszer ◽  
B. B. Kosmowski

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