Three Degrees-of-Freedom Hybrid Stage With Dual Actuators and Its Precision Motion Control
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2008 ◽
Vol 2
(5)
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pp. 392-401
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2002 ◽
Vol 7
(1)
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pp. 67-78
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2004 ◽
2021 ◽
2011 ◽
Vol 47
(11)
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pp. 185
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