Ultra-precision Motion Control and Synchronization Control for Stage of Lithography

2011 ◽  
Vol 47 (11) ◽  
pp. 185 ◽  
Author(s):  
Wei TENG
Keyword(s):  
Motion Control ◽  
Synchronization Control ◽  
Precision Motion Control ◽  
Ultra Precision ◽  
Control And Synchronization ◽  
Precision Motion

scholarly journals Iterative tuning notch filter for suppressing resonance in ultra-precision motion control

2016 ◽  
Vol 8 (11) ◽  
pp. 168781401667409 ◽  
Author(s):  
Wei Teng ◽  
Xiaolong Zhang ◽  
Yangyang Zhang ◽  
Liangliang Yang
Keyword(s):  
Motion Control ◽  
Notch Filter ◽  
Precision Motion Control ◽  
Ultra Precision ◽  
Precision Motion

The Study of Control System for Reconfigurable Machine Tool Model

2011 ◽  
Vol 188 ◽  
pp. 499-502
Author(s):  
L. Zhou ◽  
Wen Jie Nie ◽  
Z.R. Liao ◽  
X.R. Liang ◽  
G.Q. Pan
Keyword(s):  
Control System ◽  
Machine Tool ◽  
Motion Control ◽  
Machine Tools ◽  
Single Chip ◽  
Single Chip Microcomputer ◽  
Precision Motion Control ◽  
Single Function ◽  
Precision Motion ◽  
Reconfigurable Machine Tool

With the higher requirements of product processing, single-function machine can not meet the production needs. By analyzing the principles of reconfigurable machine tools, based on 51 single-chip microcomputer, this article researches the control system of reconfigurable machine tool, implements precision motion control for motors. The research can also reduce costs, so the practicality and economy all have a certain advantage, which will help promote the use in practice.

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