scholarly journals Air Exposure Improvement of Optical Properties of Hydrogenated Nanostructured Silicon Thin Films for Optoelectronic Application

10.5772/20312 ◽  
2011 ◽  
Author(s):  
Atif Mossad
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Air Exposure ◽  
Optoelectronic Application ◽  
Silicon Thin Films ◽  
Nanostructured Silicon

Effect of Nitrogen Doping on the Structure and Optical Properties of N-Type Hydrogenated Amorphous Silicon Thin Films

2011 ◽  
Vol 383-390 ◽  
pp. 6980-6985
Author(s):  
Mao Yang Wu ◽  
Wei Li ◽  
Jun Wei Fu ◽  
Yi Jiao Qiu ◽  
Ya Dong Jiang
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Amorphous Silicon ◽  
Photoelectron Spectroscopy ◽  
Gas Flow ◽  
Hydrogenated Amorphous Silicon ◽  
Chemical Vapor ◽  
Silicon Thin Films ◽  
Frequency Plasma ◽  
Hydrogenated Amorphous

Hydrogenated amorphous silicon (a-Si:H) thin films doped with both Phosphor and Nitrogen are deposited by ratio frequency plasma enhanced chemical vapor deposition (PECVD). The effect of gas flow rate of ammonia (FrNH3) on the composition, microstructure and optical properties of the films has been investigated by X-ray photoelectron spectroscopy, Raman spectroscopy and ellipsometric spectra, respectively. The results show that with the increase of FrNH3, Si-N bonds appear while the short-range order deteriorate in the films. Besides, the optical properties of N-doped n-type a-Si:H thin films can be easily controlled in a PECVD system.

A New General Method for the Determination of Optical Properties of Amorphous Silicon Films

1990 ◽  
Vol 192 ◽  
Author(s):  
G. Amato ◽  
L. Boarino ◽  
F. Fizzotti ◽  
C. Manfredotti
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Amorphous Silicon ◽  
Optical Response ◽  
The Other ◽  
New Method ◽  
Silicon Thin Films ◽  
Physical Insight ◽  
General Method

ABSTRACTWe propose to apply a new method to model the optical response of amorphous silicon thin films. This method presents the advantage of having a good physical insight. On the other hand, although the model has been originally tested on different materials like a-Si, a-Ge and a-GaAs, we show that it is also sensitive to small differences like those that can exist between intrinsic and doped a-Si:H.

Soluble polycyclosilane–polysiloxane hybrid material and silicon thin film with optical properties at 193 nm and etch selectivity

2015 ◽  
Vol 3 (2) ◽  
pp. 239-242 ◽  
Author(s):  
Sung Jin Park ◽  
Hyeon Mo Cho ◽  
Myong Euy Lee ◽  
Miyoung Kim ◽  
Kwenwoo Han ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Optical Properties ◽  
Hybrid Materials ◽  
Hybrid Material ◽  
Silicon Thin Film ◽  
New Class ◽  
Silicon Thin Films ◽  
193 Nm

Silicon thin films that fulfil the needs of current semiconductor lithography were prepared from a new class of polycyclosilane–polysiloxane hybrid materials.

Morphological and optical properties of silicon thin films by PLD

2009 ◽  
Vol 255 (10) ◽  
pp. 5299-5302 ◽  
Author(s):  
R. Ayouchi ◽  
R. Schwarz ◽  
L.V. Melo ◽  
R. Ramalho ◽  
E. Alves ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Silicon Thin Films

Structure, composition and electro-optical properties of n-type amorphous and microcrystalline silicon thin films

1997 ◽  
Vol 76 (3) ◽  
pp. 249-258 ◽  
Author(s):  
R. Martins ◽  
A. Maçarico ◽  
M. Vieira ◽  
I. Ferreira ◽  
E. Fortunato
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films

Modification on Forouhi and Bloomer model for the optical properties of amorphous silicon thin films

2007 ◽  
Vol 515 (7-8) ◽  
pp. 3910-3913 ◽  
Author(s):  
Yong Liu ◽  
Gang Xu ◽  
Chenlu Song ◽  
Wenjian Weng ◽  
Piyi Du ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Amorphous Silicon ◽  
Silicon Thin Films
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