Surface finish and subsurface damage distribution during diamond turning of silicon
2017 ◽
Vol 2
(7)
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pp. 433-435
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2015 ◽
Vol 828-829
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pp. 62-68
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2019 ◽
Vol 1
(1)
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pp. 012007
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Keyword(s):
2006 ◽
Vol 173
(3)
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pp. 337-344
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Keyword(s):
2013 ◽
Vol 49
(03)
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pp. 88
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