Design and Simulation of MEMS Capacitive Pressure Sensor Array for Wide Range Pressure Measurement
2017 ◽
Vol 163
(6)
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pp. 39-46
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Keyword(s):
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2019 ◽
Vol 11
(12)
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pp. 11928-11935
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Keyword(s):
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2011 ◽
Vol 21
(5)
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pp. 054005
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