scholarly journals Design and Simulation of MEMS Capacitive Pressure Sensor Array for Wide Range Pressure Measurement

2017 ◽  
Vol 163 (6) ◽  
pp. 39-46 ◽  
Author(s):  
Kirankumar B. ◽  
B. G. ◽  
Veekshit B.
2020 ◽  
Vol 8 (4) ◽  
pp. 296-307
Author(s):  
Konstantin Krestovnikov ◽  
Aleksei Erashov ◽  
Аleksandr Bykov

This paper presents development of pressure sensor array with capacitance-type unit sensors, with scalable number of cells. Different assemblies of unit pressure sensors and their arrays were considered, their characteristics and fabrication methods were investigated. The structure of primary pressure transducer (PPT) array was presented; its operating principle of array was illustrated, calculated reference ratios were derived. The interface circuit, allowing to transform the changes in the primary transducer capacitance into voltage level variations, was proposed. A prototype sensor was implemented; the dependency of output signal power from the applied force was empirically obtained. In the range under 30 N it exhibited a linear pattern. The sensitivity of the array cells to the applied pressure is in the range 134.56..160.35. The measured drift of the output signals from the array cells after 10,000 loading cycles was 1.39%. For developed prototype of the pressure sensor array, based on the experimental data, the average signal-to-noise ratio over the cells was calculated, and equaled 63.47 dB. The proposed prototype was fabricated of easily available materials. It is relatively inexpensive and requires no fine-tuning of each individual cell. Capacitance-type operation type, compared to piezoresistive one, ensures greater stability of the output signal. The scalability and adjustability of cell parameters are achieved with layered sensor structure. The pressure sensor array, presented in this paper, can be utilized in various robotic systems.


2019 ◽  
Vol 11 (12) ◽  
pp. 11928-11935 ◽  
Author(s):  
Jian Wang ◽  
Ryuki Suzuki ◽  
Marine Shao ◽  
Frédéric Gillot ◽  
Seimei Shiratori

Sensors ◽  
2021 ◽  
Vol 21 (2) ◽  
pp. 442
Author(s):  
Kyobin Keum ◽  
Jae Sang Heo ◽  
Jimi Eom ◽  
Keon Woo Lee ◽  
Sung Kyu Park ◽  
...  

Textile-based pressure sensors have garnered considerable interest in electronic textiles due to their diverse applications, including human–machine interface and healthcare monitoring systems. We studied a textile-based capacitive pressure sensor array using a poly(vinylidene fluoride)-co-hexafluoropropylene (PVDF-HFP)/ionic liquid (IL) composite film. By constructing a capacitor structure with Ag-plated conductive fiber electrodes that are embedded in fabrics, a capacitive pressure sensor showing high sensitivity, good operation stability, and a wide sensing range could be created. By optimizing the PVDF-HFP:IL ratio (6.5:3.5), the fabricated textile pressure sensors showed sensitivity of 9.51 kPa−1 and 0.69 kPa−1 in the pressure ranges of 0–20 kPa and 20–100 kPa, respectively. The pressure-dependent capacitance variation in our device was explained based on the change in the contact-area formed between the multi-filament fiber electrodes and the PVDF-HFP/IL film. To demonstrate the applicability and scalability of the sensor device, a 3 × 3 pressure sensor array was fabricated. Due to its matrix-type array structure and capacitive sensing mechanism, multi-point detection was possible, and the different positions and the weights of the objects could be identified.


2019 ◽  
Vol 26 (2) ◽  
pp. 181-188
Author(s):  
Kazimierz Witkowski ◽  
Jacek Wysocki

Abstract The article discusses one of the most popular methods of diagnosing selected damages of marine piston engines, which is the indication or measurement of pressure changes in the engine’s combustion chamber. Improving the quality of indicator diagrams may contribute to the increase in the efficiency of using the parameters indicated in the diagnostics of marine piston engines. Measurement errors during engine indication are primarily caused by measuring channels that connect the combustion chamber to the pressure sensor. One way to avoid these errors is to install the pressure sensor directly in the combustion chamber. It seems that it is possible to eliminate these errors. However, there is a risk that the pressure sensor will be damaged by the effect of high temperature on it during combustion of the fuel-air mixture in the engine’s combustion chamber. The article presents the results of tests that indicate that the measured temperatures in the place where the sensor was installed (in the combustion chamber) did not exceed the critical value specified by the pressure sensor manufacturer. The article also presents the results of cylinder pressure measurement not only in the combustion chamber but also in two other points - on the thread of the indicator cock and in the measuring channel between the indicator cock and the cylinder head. The tests were carried out in a wide range of engine load technically efficient and with simulated damage in the fuel injection system. The article presents a comparative analysis of the parameters read out of the indicator diagram for the three above-mentioned pressure measurement locations. It was shown that the pressure measurements carried out directly in the combustion chamber are free from errors resulting from the influence of measuring channels and indicator cock.


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