Effect of Annealing Temperature on the Electrical Performance of SiZnSnO Thin Film Transistors Fabricated by Radio Frequency Magnetron Sputtering

Byoungkeun Kim; Sang Yeol Lee

doi:10.4313/teem.2017.18.1.55

Effect of Annealing Temperature on the Electrical Performance of SiZnSnO Thin Film Transistors Fabricated by Radio Frequency Magnetron Sputtering

Transactions on Electrical and Electronic Materials ◽

10.4313/teem.2017.18.1.55 ◽

2017 ◽

Vol 18 (1) ◽

pp. 55-57 ◽

Cited By ~ 1

Author(s):

Byoungkeun Kim ◽

Sang Yeol Lee

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Thin Film Transistors ◽

Annealing Temperature ◽

Radio Frequency Magnetron ◽

Electrical Performance ◽

Radio Frequency Magnetron Sputtering

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Fabrication and characterizations of ZnO thin film transistors prepared by using radio frequency magnetron sputtering

Solid-State Electronics ◽

10.1016/j.sse.2007.11.010 ◽

2008 ◽

Vol 52 (5) ◽

pp. 813-816 ◽

Cited By ~ 41

Author(s):

R. Navamathavan ◽

Chi Kyu Choi ◽

Eun-Jeong Yang ◽

Jae-Hong Lim ◽

Dae-Kue Hwang ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Thin Film Transistors ◽

Radio Frequency Magnetron ◽

Zno Thin Film ◽

Radio Frequency Magnetron Sputtering

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Thin film transistors based on TiO2 fabricated by using radio-frequency magnetron sputtering

Journal of Physics and Chemistry of Solids ◽

10.1016/j.jpcs.2010.08.024 ◽

2010 ◽

Vol 71 (12) ◽

pp. 1760-1762 ◽

Cited By ~ 4

Author(s):

W.S. Shih ◽

S.J. Young ◽

L.W. Ji ◽

W. Water ◽

T.H. Meen ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Thin Film Transistors ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Room-temperature fabrication of bilayer InZnO:Li/MgZnO:Li thin film transistors using radio frequency magnetron sputtering

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/aac60c ◽

2018 ◽

Vol 51 (25) ◽

pp. 255105 ◽

Cited By ~ 1

Author(s):

Longjie Tian ◽

Yaobin Ma ◽

Qi Wang ◽

Ran Li ◽

Shiqian Dai ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Thin Film Transistors ◽

Room Temperature ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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The Effect of the Thickness and Oxygen Ratio Control of Radio-Frequency Magnetron Sputtering on MgZnO Thin-Film Transistors

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2017.12852 ◽

2017 ◽

Vol 17 (3) ◽

pp. 2037-2040 ◽

Cited By ~ 1

Author(s):

Jyun-Yi Li ◽

Sheng-Po Chang ◽

Shoou-Jinn Chang ◽

Hung-Hsu Lin ◽

Ming-Hung Hsu

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Thin Film Transistors ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Oxygen Ratio

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Characteristics of Gallium-Doped Zinc Oxide Thin-Film Transistors Fabricated at Room Temperature Using Radio Frequency Magnetron Sputtering Method

Japanese Journal of Applied Physics ◽

10.1143/jjap.47.87 ◽

2008 ◽

Vol 47 (1) ◽

pp. 87-90 ◽

Cited By ~ 6

Author(s):

Hoonha Jeon ◽

Ved Prakash Verma ◽

Sookhyun Hwang ◽

Sooyeon Lee ◽

Chiyoung Park ◽

...

Keyword(s):

Thin Film ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Thin Film Transistors ◽

Room Temperature ◽

Radio Frequency Magnetron ◽

Oxide Thin Film ◽

Radio Frequency Magnetron Sputtering ◽

Zinc Oxide Thin Film

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High-mobility transparent thin-film transistors with ZnSnLiO channel layer prepared by radio frequency magnetron sputtering

Applied Physics A ◽

10.1007/s00339-014-8936-8 ◽

2014 ◽

Vol 118 (4) ◽

pp. 1535-1538 ◽

Cited By ~ 2

Author(s):

Hailong Wang ◽

Bin Li ◽

Zuofu Hu ◽

Huaihao Wu ◽

Dongzhan Zhou ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Thin Film Transistors ◽

High Mobility ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Channel Layer

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Fabrication and Electrical Characterization of InZnO:N Thin Film Transistors Prepared by Radio Frequency Magnetron Sputtering

Journal of Electronic Materials ◽

10.1007/s11664-016-4491-8 ◽

2016 ◽

Vol 45 (7) ◽

pp. 3340-3342 ◽

Cited By ~ 4

Author(s):

Yunfei Peng ◽

Hailong Wang ◽

Wenqi Zhang ◽

Bin Li ◽

Dongzhan Zhou ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Thin Film Transistors ◽

Electrical Characterization ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering

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Preparation and electrical characteristics of N-doped In-Zn-Sn-O thin film transistors by radio frequency magnetron sputtering

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2018.04.058 ◽

2018 ◽

Vol 750 ◽

pp. 1003-1006 ◽

Cited By ~ 8

Author(s):

Jinbao Su ◽

Ye Wang ◽

Yaobin Ma ◽

Qi Wang ◽

Longjie Tian ◽

...

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Thin Film Transistors ◽

Radio Frequency Magnetron ◽

Electrical Characteristics ◽

Radio Frequency Magnetron Sputtering

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Simulation, Fabrication and Characterization of ZnO Based Thin Film Transistors Grown by Radio Frequency Magnetron Sputtering

Journal of Nanoscience and Nanotechnology ◽

10.1166/jnn.2012.5194 ◽

2012 ◽

Vol 12 (3) ◽

pp. 1880-1885 ◽

Cited By ~ 11

Author(s):

Shaivalini Singh ◽

P. Chakrabarti

Keyword(s):

Thin Film ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Thin Film Transistors ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Fabrication And Characterization

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Electrical properties of ZnO-based bottom-gate thin film transistors fabricated by using radio frequency magnetron sputtering

Journal of Alloys and Compounds ◽

10.1016/j.jallcom.2008.08.039 ◽

2009 ◽

Vol 475 (1-2) ◽

pp. 889-892 ◽

Cited By ~ 22

Author(s):

R. Navamathavan ◽

Chi Kyu Choi ◽

Seong-Ju Park

Keyword(s):

Thin Film ◽

Electrical Properties ◽

Magnetron Sputtering ◽

Radio Frequency ◽

Thin Film Transistors ◽

Radio Frequency Magnetron ◽

Radio Frequency Magnetron Sputtering ◽

Bottom Gate

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