Simulation, Fabrication and Characterization of ZnO Based Thin Film Transistors Grown by Radio Frequency Magnetron Sputtering

2012 ◽  
Vol 12 (3) ◽  
pp. 1880-1885 ◽  
Author(s):  
Shaivalini Singh ◽  
P. Chakrabarti
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Thin Film Transistors ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Fabrication And Characterization

Fabrication and characterizations of ZnO thin film transistors prepared by using radio frequency magnetron sputtering

2008 ◽  
Vol 52 (5) ◽  
pp. 813-816 ◽  
Author(s):  
R. Navamathavan ◽  
Chi Kyu Choi ◽  
Eun-Jeong Yang ◽  
Jae-Hong Lim ◽  
Dae-Kue Hwang ◽  
...  
Keyword(s):  
Thin Film ◽  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Thin Film Transistors ◽  
Radio Frequency Magnetron ◽  
Zno Thin Film ◽  
Radio Frequency Magnetron Sputtering

Fabrication and characterization of superhard tungsten boride layers deposited by radio frequency magnetron sputtering

2016 ◽  
Vol 42 (10) ◽  
pp. 12221-12230 ◽  
Author(s):  
Justyna Chrzanowska ◽  
Łukasz Kurpaska ◽  
Maciej Giżyński ◽  
Jacek Hoffman ◽  
Zygmunt Szymański ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Radio Frequency ◽  
Radio Frequency Magnetron ◽  
Radio Frequency Magnetron Sputtering ◽  
Tungsten Boride ◽  
Fabrication And Characterization
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