A Combustion Pressure Sensor Utilizing Silicon Piezoresistive Effect

1993 ◽  
Author(s):  
Masaharu Takeuchi ◽  
Kouji Tsukada ◽  
Yutaka Nonomura ◽  
Yoshiteru Omura ◽  
Yoshiki Chujou
Keyword(s):  
Pressure Sensor ◽  
Piezoresistive Effect ◽  
Combustion Pressure

scholarly journals Study on the Stability of the Electrical Connection of High-Temperature Pressure Sensor Based on the Piezoresistive Effect of P-Type SiC

Micromachines ◽  
2021 ◽  
Vol 12 (2) ◽  
pp. 216
Author(s):  
Yongwei Li ◽  
Ting Liang ◽  
Cheng Lei ◽  
Qiang Li ◽  
Zhiqiang Li ◽  
...  
Keyword(s):  
High Temperature ◽  
Pressure Sensor ◽  
Pressure Sensors ◽  
Extreme Environment ◽  
Maximum Temperature ◽  
Piezoresistive Effect ◽  
Electrical Connection ◽  
Contact Stability ◽  
The Stability ◽  
P Type

In this study, a preparation method for the high-temperature pressure sensor based on the piezoresistive effect of p-type SiC is presented. The varistor with a positive trapezoidal shape was designed and etched innovatively to improve the contact stability between the metal and SiC varistor. Additionally, the excellent ohmic contact was formed by annealing at 950 °C between Ni/Al/Ni/Au and p-type SiC with a doping concentration of 1018cm−3. The aging sensor was tested for varistors in the air of 25 °C–600 °C. The resistance value of the varistors initially decreased and then increased with the increase of temperature and reached the minimum at ~450 °C. It could be calculated that the varistors at ~100 °C exhibited the maximum temperature coefficient of resistance (TCR) of ~−0.35%/°C. The above results indicated that the sensor had a stable electrical connection in the air environment of ≤600 °C. Finally, the encapsulated sensor was subjected to pressure/depressure tests at room temperature. The test results revealed that the sensor output sensitivity was approximately 1.09 mV/V/bar, which is better than other SiC pressure sensors. This study has a great significance for the test of mechanical parameters under the extreme environment of 600 °C.

Glow Plug with Combustion Pressure Sensor

2003 ◽  
Author(s):  
Jyunji Moriwaki ◽  
Hiroyuki Murai ◽  
Akihiko Kameshima
Keyword(s):  
Pressure Sensor ◽  
Combustion Pressure ◽  
Glow Plug

Multi-Channel and Portable Fiber Optic Combustion Pressure Sensor System

1995 ◽  
Author(s):  
Thomas Poorman ◽  
Sergiey Kalashnikov ◽  
Marek T. Wlodarczyk ◽  
Adam Daire ◽  
Wayne Goeke ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
Fiber Optic ◽  
Sensor System ◽  
Combustion Pressure

Stress and frequency analysis of silicon diaphragm of MEMS based piezoresistive pressure sensor

2019 ◽  
Vol 33 (07) ◽  
pp. 1950040 ◽  
Author(s):  
Samridhi ◽  
Manish Kumar ◽  
Sachin Dhariwal ◽  
Kulwant Singh ◽  
P. A. Alvi
Keyword(s):  
Frequency Analysis ◽  
Pressure Sensor ◽  
Dynamic Environment ◽  
High Sensitivity ◽  
Vibrational Modes ◽  
Piezoresistive Effect ◽  
Micro Electro Mechanical Systems ◽  
Enhanced Sensitivity ◽  
Piezoresistive Pressure Sensor ◽  
Frame Work

This paper reports the stress and frequency analysis of dynamic silicon diaphragm during the simulation of micro-electro-mechanical-systems (MEMS) based piezoresistive pressure sensor with the help of finite element method (FEM) within the frame work of COMSOL software. Vibrational modes of rectangular diaphragm of piezoresistive pressure sensor have been determined at different frequencies for different pressure ranges. Optimal frequency range for particular applications for any diaphragm is a very important so that MEMS sensors performance should not degrade during the dynamic environment. Therefore, for the MEMS pressure sensor having applications in dynamic environment, the diaphragm frequency of 280 KHz has been optimized for the diaphragm thickness of 50 [Formula: see text]m and hence this frequency can be considered for showing the better piezoresistive effect and high sensitivity. Moreover, the designed pressure sensor shows the high linearity and enhanced sensitivity of the order of ([Formula: see text]0.5066 mV/psi).

Commercially available low-cost fiber optic combustion pressure sensor

1995 ◽  
Author(s):  
Thomas J. Poorman ◽  
Sergey P. Kalashnikov ◽  
Marek T. Wlodarczyk
Keyword(s):  
Pressure Sensor ◽  
Fiber Optic ◽  
Low Cost ◽  
Combustion Pressure
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