scholarly journals Effects of Crystallization on Internal Stress of ITO Films

2012 ◽  
Vol 63 (4) ◽  
pp. 272
Author(s):  
Hiroyasu KOJIMA ◽  
Nagahiro SAITO ◽  
Osamu TAKAI
Keyword(s):  
Internal Stress ◽  
Ito Films

Internal Stress of ITO, IZO and GZO Films Deposited by RF and DC Magnetron Sputtering

2001 ◽  
Vol 666 ◽  
Author(s):  
T. Sasabayashi ◽  
P. K. Song ◽  
Y. Shigesato ◽  
K. Utsumi ◽  
A. Kaijo ◽  
...  
Keyword(s):  
Zinc Oxide ◽  
Magnetron Sputtering ◽  
Internal Stress ◽  
Compressive Stress ◽  
Transparent Conductive Oxide ◽  
Amorphous Structure ◽  
Dc Magnetron Sputtering ◽  
Glass Substrates ◽  
Commercial Applications ◽  
Ito Films

ABSTRACTMechanical properties such as internal stress or adhesion of transparent conductive oxide (TCO) films are quite important to guarantee the patterning accuracy and the durability for various kinds of commercial applications. In this study, representative TCO films with the thickness of about 200 nm, such as tin-doped indium oxide (ITO), indium-zinc oxide (IZO), and gallium-doped zinc oxide (GZO) films were deposited on unheated glass substrate by rf and dc magnetron sputtering using corresponding oxide targets under various total gas pressure (Ptot) from 0.3 to 3.0 Pa. The internal stress of these TCO films was measured by cantilever method using 50 µ m thick 50mmx5mm micro-sheet glass substrates in relation to the Ptot during the deposition. The ITO films deposited at Ptot lower than 0.7 Pa were polycrystalline and showed large compressive stress, while the amorphous ITO films deposited at 1.5-3.0 Pa showed a very slight tensile stress. On the contrary, the all the IZO films with various thicknesses (50-750 nm) deposited at Ptot of 0.3-3.0 Pa showed entirely amorphous structure, where the compressive stress of IZO films was lower than that of ITO films. Whereas, all the GZO films deposited under Ptot from 0.3 to 5.0 Pa showed polycrystalline structure with <001> preferred orientation, where the compressive stress showed almost constant for all the films.

Spalling Technology of PZT Thin Film Capacitor using Internal Stress

2014 ◽  
Vol 134 (4) ◽  
pp. 85-89
Author(s):  
Kazutaka Sueshige ◽  
Fumiaki Honda ◽  
Tadatomo Suga ◽  
Masaaki Ichiki ◽  
Toshihiro Itoh
Keyword(s):  
Thin Film ◽  
Internal Stress ◽  
Film Capacitor ◽  
Thin Film Capacitor ◽  
Pzt Thin Film

scholarly journals Evolution of Internal Stress in Heterogeneous Electrode Composite during the Drying Process

Energies ◽  
2021 ◽  
Vol 14 (6) ◽  
pp. 1683
Author(s):  
Zuoquan Zhu ◽  
Yaolong He ◽  
Hongjiu Hu ◽  
Fangzhou Zhang
Keyword(s):  
Internal Stress ◽  
Vinylidene Fluoride ◽  
Influence Factors ◽  
Lithium Ion ◽  
Integrated Analysis ◽  
Drying Time ◽  
Component Distribution ◽  
Poly Vinylidene Fluoride ◽  
Inactive Ingredients ◽  
Main Influence

The mechanical behavior of electrode composite during the drying preparation has played a crucial role in the electrochemical performance of lithium-ion batteries (LIBs). Our work aimed at developing an integrated analysis method to study the component distribution, mechanical properties, and internal stress of composite coating in the process of electrode drying. The main influence factors of drying stress were thoroughly investigated. It was found that this present model could capture not only the heterogeneity effect of inactive ingredients but also the porosity-dependent viscoelasticity of electrode composite. Meanwhile, the calculated effective modulus and stress evolution upon drying time were in acceptable accord with the experimental data. Furthermore, the rapid solidification markedly increased the drying stress in electrodes and significantly impaired the tensile strength of electrode composite due to the highly gradient distributed constituents. However, the stress level at high drying temperature could be significantly reduced by an aqueous sodium alginate binder instead of poly(vinylidene fluoride). The obtained results will be a great help in efficiently manufacturing LIB electrodes with adequate mechanical integrity.

scholarly journals Optoelectronic Properties of Ultrathin Indium Tin Oxide Films: A First-Principle Study

Crystals ◽  
2020 ◽  
Vol 11 (1) ◽  
pp. 30
Author(s):  
Xiaoyan Liu ◽  
Lei Wang ◽  
Yi Tong
Keyword(s):  
Film Thickness ◽  
Tin Oxide ◽  
Indium Tin Oxide ◽  
Density Functional ◽  
Optoelectronic Properties ◽  
Surface Strain ◽  
Strain Effect ◽  
First Principle ◽  
Electrical Resistivities ◽  
Ito Films

First-principle density functional theory simulations have been performed to predict the electronic structures and optoelectronic properties of ultrathin indium tin oxide (ITO) films, having different thicknesses and temperatures. Our results and analysis led us to predict that the physical properties of ultrathin films of ITO have a direct relation with film thickness rather than temperature. Moreover, we found that a thin film of ITO (1 nm thickness) has a larger absorption coefficient, lower reflectivity, and higher transmittance in the visible light region compared with that of 2 and 3 nm thick ITO films. We suggest that this might be due to the stronger surface strain effect in 1 nm thick ITO film. On the other hand, all three thin films produce similar optical spectra. Finally, excellent agreement was found between the calculated electrical resistivities of the ultrathin film of ITO and that of its experimental data. It is concluded that the electrical resistivities reduce along with the increase in film thickness of ITO because of the short strain length and limited bandgap distributions.

Within-tree variability of internal stress generated during drying of rubberwood lumber

2017 ◽  
Vol 76 (1) ◽  
pp. 113-122 ◽  
Author(s):  
Jaipet Tomad ◽  
Sataporn Jantawee ◽  
Wanchart Preechatiwong ◽  
Nirundorn Matan
Keyword(s):  
Internal Stress
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