Room Temperature Debonding - An Enabling Technology for TSV and 3D Integration

2012 ◽  
Vol 2012 (DPC) ◽  
pp. 001755-001782
Author(s):  
Thorsten Matthias ◽  
Eric Pabo ◽  
Juergen Burggraf ◽  
Daniel Burgstaller ◽  
Markus Wimplinger ◽  
...  
Keyword(s):  
Room Temperature ◽  
New Technology ◽  
3D Integration ◽  
Adhesive Properties ◽  
Thermally Induced ◽  
Processing Cost ◽  
Temporary Bonding ◽  
Wafer Processing ◽  
High Yields ◽  
Debonding Process

Thin wafer processing is a critical technology for TSV manufacturing and 3D integration. Thin wafer processing allows to reduce the aspect ratio of the vias, thereby reducing the total processing cost and enables ultra-thin packages for handheld applications. Temporary bonding to a rigid support carrier and debonding after backside processing have been used for thin wafer handling/processing for many years. However, so far all the debonding methods imposed severe limitations on the manufacturability. For light induced debonding the carrier had to be transparent and for solvent based debonding the carrier had to be perforated. For thermally induced debonding, “slide-off debonding” the debonding temperature had to be below the reflow temperature of the solder bumps, which limited the maximal process temperature of the adhesive. In this paper we describe a new debonding method at room temperature. This new technology decouples the debonding process from the adhesive properties, which creates a de facto material independent debonding standard. As the debonding process does not rely on the adhesive properties a major boundary for adhesive engineering has been removed. The debonding method is compatible with bumps or pillars in the bond interface as well as on the backside of the wafer stack. No force is applied on the bumps during debonding which results in very high yields.

RECENT DEVELOPMENTS ON 3D INTEGRATION OF METALLIC SET ONTO CMOS PROCESS FOR MEMORY APPLICATION

2012 ◽  
Vol 11 (04) ◽  
pp. 1240024 ◽  
Author(s):  
N. JOUVET ◽  
M. A. BOUNOUAR ◽  
S. ECOFFEY ◽  
C. NAUENHEIM ◽  
A. BEAUMONT ◽  
...  
Keyword(s):  
Room Temperature ◽  
Memory Cell ◽  
Atomic Layer ◽  
Cmos Process ◽  
3D Integration ◽  
Simulation Tools ◽  
Layer Deposition ◽  
Recent Developments ◽  
Sram Memory ◽  
Electrical Characterizations

This work presents a nanodamascene process for a CMOS back-end-of-line fabrication of metallic single electron transistor(SET), together with the use of simulation tools for the development of a SET SRAM memory cell. We show room temperature electrical characterizations of SETs fabricated on CMOS with relaxed dimensions, and simulations of a SET SRAM memory cell. Using their physical characteristics achievable through the use of atomic layer deposition, it will be demonstrated that it has the potential to operate at temperature up to 398 K, and that power consumption is less than that of equivalent circuit in advanced CMOS technologies. In order to take advantage of both low power SETs and high CMOS drive efficiency, a hybrid 3D SET CMOS circuit is proposed.

scholarly journals Synthesis of spiro[dihydropyridine-oxindoles] via three-component reaction of arylamine, isatin and cyclopentane-1,3-dione

2013 ◽  
Vol 9 ◽  
pp. 8-14 ◽  
Author(s):  
Yan Sun ◽  
Jing Sun ◽  
Chao-Guo Yan
Keyword(s):  
Acetic Acid ◽  
Reaction Mechanism ◽  
Room Temperature ◽  
The Other ◽  
Other Hand ◽  
Three Component Reaction ◽  
High Yields

A fast and convenient protocol for the synthesis of novel spiro[dihydropyridine-oxindole] derivatives in satisfactory yields was developed by the three-component reactions of arylamine, isatin and cyclopentane-1,3-dione in acetic acid at room temperature. On the other hand the condensation of isatin with two equivalents of cyclopentane-1,3-dione gave 3,3-bis(2-hydroxy-5-oxo-cyclopent-1-enyl)oxindole in high yields. The reaction mechanism and substrate scope of this novel reaction is briefly discussed.

Boron Trifluoride-assisted Reactions of 1-Benzothiophen-3(2H)-one with Various Ketones: A Convenient Entry to 2-Methylene-1 -benzothiophen-3(2H)-one and/or 6H-Di[1]benzothieno[3,2-b:2,3-e]pyran Derivatives

1999 ◽  
Vol 23 (9) ◽  
pp. 542-543
Author(s):  
Alessandro Fraleoni ◽  
Paolo Zanirato
Keyword(s):  
Diethyl Ether ◽  
Boron Trifluoride ◽  
Room Temperature ◽  
Steric Factors ◽  
High Yields

The title compounds are obtained in moderate to high yields by BF3-assisted reaction of 1-benzothiophen-3(2 H)-one with nine ketones in diethyl ether at room temperature; the relative amounts of pyran 1 and ylidene 2 prove to be dependent upon electronic and steric factors.

UV-Light-Induced Dehydrogenative N-Acylation of Amines with 2-Nitrobenzaldehydes to Give 2-Aminobenzamides

Synthesis ◽  
2022 ◽  
Author(s):  
Dishu Zeng ◽  
Tianbao Yang ◽  
Niu Tang ◽  
Wei Deng ◽  
Jiannan Xiang ◽  
...  
Keyword(s):  
Amino Acid ◽  
Organic Synthesis ◽  
Efficient Method ◽  
Building Block ◽  
Room Temperature ◽  
Uv Light ◽  
Amino Acid Derivatives ◽  
One Pot ◽  
Plausible Mechanism ◽  
High Yields

A simple, mild, green and efficient method for the synthesis of 2-aminobenzamides was highly desired in organic synthesis. Herein, we developed an efficient, one-pot strategy for the synthesis of 2-aminobenzamides with high yields irradiated by UV light. 32 examples proceeded successfully by this photo-induced protocol. The yield reached up to 92%. The gram scale was also achieved easily. This building block could be applied in the preparation of quinazolinones derivatives. Amino acid derivatives could be employed smoothly at room temperature. Finally, a plausible mechanism was proposed.

scholarly journals Silylated gallium and indium chalcogenide ring systems as potential precursors to ME (E=O, S) materials

2013 ◽  
Vol 11 (7) ◽  
pp. 1225-1238
Author(s):  
Iliana Medina-Ramírez ◽  
Cynthia Floyd ◽  
Joel Mague ◽  
Mark Fink
Keyword(s):  
Thermal Decomposition ◽  
Room Temperature ◽  
Membered Ring ◽  
Molecular Structures ◽  
Nmr Studies ◽  
X Ray ◽  
X Ray Crystallography ◽  
High Yields ◽  
Vt Nmr ◽  
State 1

AbstractThe reaction of R3M (M=Ga, In) with HESiR′3 (E=O, S; R′3=Ph3, iPr3, Et3, tBuMe2) leads to the formation of (Me2GaOSiPh3)2(1); (Me2GaOSitBuMe2)2(2); (Me2GaOSiEt3)2(3); (Me2InOSiPh3)2(4); (Me2InOSitBuMe2)2(5); (Me2InOSiEt3)2(6); (Me2GaSSiPh3)2(7); (Et2GaSSiPh3)2(8); (Me2GaSSiiPr3)2(9); (Et2GaSSiiPr3)2(10); (Me2InSSiPh3)3(11); (Me2InSSiiPr3)n(12), in high yields at room temperature. The compounds have been characterized by multinuclear NMR and in most cases by X-ray crystallography. The molecular structures of (1), (4), (7) and (8) have been determined. Compounds (3), (6) and (10) are liquids at room temperature. In the solid state, (1), (4), (7) and (9) are dimers with central core of the dimer being composed of a M2E2 four-membered ring. VT-NMR studies of (7) show facile redistribution between four- and six-membered rings in solution. The thermal decomposition of (1)–(12) was examined by TGA and range from 200 to 350°C. Bulk pyrolysis of (1) and (2) led to the formation of Ga2O3; (4) and (5) In metal; (7)–(10) GaS and (11)–(12) InS powders, respectively.

Iron(II) and Nickel(II) Complexes of 2,6-Di(thiazol-2-yl)pyridine and Related Ligands

1991 ◽  
Vol 44 (8) ◽  
pp. 1041 ◽  
Author(s):  
AT Baker ◽  
P Singh ◽  
V Vignevich
Keyword(s):  
High Spin ◽  
Room Temperature ◽  
Spin Transition ◽  
Magnetic Behaviour ◽  
Diethyl Acetal ◽  
Thermally Induced ◽  
Field Strengths

2,6-Di(thiazol-2-yl]pyridine (1a), 2,6-di(4-methylthiazol-2-yl)pyridine (1b) and 2,6-di(2-imid-azolin-2-yl)pyridine (3) have been prepared by the reaction of pyridine-2,6-dicarbothioamide with bromoacetaldehyde diethyl acetal, bromoacetone and ethylenediamine, severally. Bis ( ligand ) iron(II) and nickel(II) complexes of all ligands have been prepared. The bis ( ligand ) iron(II) complexes of (1a) and (3) are low-spin whereas that of (1b) is high-spin at room temperature and undergoes a thermally induced spin transition. The field strengths of the ligands , determined from the spectra of their nickel(II) complexes, correlate well with the observed magnetic behaviour of their iron(II) complexes. The field strengths of (1a) and (1b) are found to be marginally less than those of the isomeric ligands 2,6-di(thiazol-4-yl)pyridine (2a) and 2,6-di(2-methylthiazol-4-yl)pyridine (2b).

scholarly journals THz technology for vision systems

2014 ◽  
Vol 27 (1) ◽  
pp. 129-136 ◽  
Author(s):  
J. Trontelj ◽  
A. Sesek ◽  
A. Svigelj
Keyword(s):  
Room Temperature ◽  
New Technology ◽  
Electrical Engineering ◽  
Thz Radiation ◽  
Vision Systems ◽  
Current Application ◽  
Operating Range ◽  
Imaging Results ◽  
System Solution ◽  
Thz Sensor

d.o.o, Sempeter pri Gorici, Slovenija KW nema KR nema The THz radiation brings new technology challenges and new opportunities to overcome some of the current application obstacles. In the paper a portable THz system is presented operating at room temperature. The presented solution is robust and inexpensive, convenient for many applications. The THz sensor fabricated at the Faculty of Electrical Engineering in the Laboratory for Microelectronics is currently one of the best sensors in its frequency operating range. It reaches sensitivity up to 1000V/W and NEP down to 5pW/?Hz in vacuum. With the proposed system solution variety of application can be covered. Some imaging results captured with the proposed system at different stand-off distances are shown in the paper.

scholarly journals A Facile Synthesis of Polysubstituted Pyrroles by One-Pot Three-Component Reaction

2012 ◽  
Vol 9 (4) ◽  
pp. 2239-2244 ◽  
Author(s):  
Hossein Anaraki-Ardakani ◽  
Maziar Noei ◽  
Mina Karbalaei-Harofteh ◽  
Shahab Zomorodbakhsh
Keyword(s):  
Room Temperature ◽  
Facile Synthesis ◽  
One Pot ◽  
Pyrrole Derivatives ◽  
Dialkyl Acetylenedicarboxylates ◽  
One Pot Synthesis ◽  
Three Component Reaction ◽  
High Yields ◽  
Neutral Conditions

A new and efficient one-pot synthesis of polysubstituted pyrrole derivatives by three-component reaction between dialkyl acetylenedicarboxylates, triphenylphosphine, 2-aminopyridin derivatives in the presence of arylglyoxals is described. The reactions were performed in dichloromethane at room temperature and neutral conditions and afforded high yields of products.

Hydrogen bonding-catalysed alcoholysis of propylene oxide at room temperature

2021 ◽  
Author(s):  
Yueting Xu ◽  
Yanfei Zhao ◽  
Fengtao Zhang ◽  
Yuepeng Wang ◽  
Ruipeng Li ◽  
...  
Keyword(s):  
Hydrogen Bonding ◽  
Ionic Liquids ◽  
Propylene Oxide ◽  
Room Temperature ◽  
Glycol Ethers ◽  
High Yields

Alcoholysis of propylene oxide is achieved over azolate ionic liquids at room temperature by hydrogen-bonding catalysis, accessing glycol ethers in moderate to high yields with selectivity of >99%.

Sign in / Sign up

Export Citation Format

Share Document