Performance of MEMS Vibratory Gyroscope under Harsh Environments

2012 ◽  
Vol 2012 (DPC) ◽  
pp. 000633-000654 ◽  
Author(s):  
Chandradip Patel ◽  
Patrick McCluskey
Keyword(s):  
Temperature Effect ◽  
High Frequency ◽  
Microelectromechanical Systems ◽  
Rate Of Change ◽  
Harsh Environments ◽  
Harsh Environment ◽  
Thermal Cycles ◽  
Mems Gyroscope ◽  
Vibratory Gyroscope ◽  
Mems Gyroscopes

Microelectromechanical systems (MEMS) gyroscope is a sensor that measures the rate of change in an angular position of an object. MEMS vibratory gyroscopes are increasingly used in applications ranging from consumer electronics to aerospace and are now one of the most common MEMS products after accelerometers.With advances in fabrication technologies, the low-cost MEMS gyroscope has opened up a wide variety of applications with environmental conditions ranging from medium to harsh. Despite their widespread use, the performance of MEMS gyroscopes in harsh environments is still under question. While some studies have been conducted to understand the effects of high mechanical shock, high frequency vibration and high frequency acoustic environment on the MEMS gyroscopes,the effects of sustained exposure to temperature combined withother harsh environment stresseshave not been well researched.Thus, it is necessary to quantify MEMS vibratory gyroscope performance under such conditions.This research reviews current harsh environment studies anddemonstrates the effects of an elevated temperature and sustained exposure to temperature combined humidity on the MEMS vibratory gyroscope. In order to quantify such effects, several tests have been performed. A short-term temperature effect on MEMS gyroscope was examined through temperature characterization test forfive thermal cycles at wider temperature ranges. A long-term temperature effect on the MEMS gyroscope was inspected through 500 thermal cycles; while, combined effects of temperature and humidity was studied through temperature humidity bias(THB) test and highly accelerated stress test (HAST).

Performance Degradation of the MEMS Vibratory Gyroscope in Harsh Environments

2011 ◽  
Author(s):  
Chandradip Patel ◽  
Patrick McCluskey
Keyword(s):  
Test Procedure ◽  
Original Position ◽  
Harsh Environments ◽  
Mems Gyroscope ◽  
Vibratory Gyroscope ◽  
Wide Range ◽  
Before And After ◽  
Mems Gyroscopes ◽  
Baseline Testing ◽  
Commercial Off The Shelf

The use of MEMS gyroscopes in a wide range of applications requiring then to function from medium to harsh environments make it necessary to evaluate the performance of MEMS gyroscopes under those conditions. This paper focuses on the effects of elevated temperature and humidity on the performance of MEMS vibratory gyroscopes. Performance of the MEMS gyroscope was evaluated by conducting Highly Accelerated Stress Testing (HAST) on a COTS (commercial-off-the-shelf) single axis MEMS vibratory gyroscope having an operating temperature range from −40C to +105C. The gyroscope sensors were exposed to 130°C and 85% relative humidity with a pressure of 33.3 psia or 230 kPa for 96 hours. Pre-baking and post-baking tests were conducted before and after HAST at 125C for 24 hours respectively. Also, stationary baseline testing (SBT) and rotary baseline testing (RBT) were performed before and after the pre-baking, HAST and post-baking tests to measure any permanent shift during the respective test. A preliminary result shows that the MEMS gyroscope output degraded in the pre-baking test and HAST; while it showed a recovery in post-baking test. After completing the entire test procedure, it was observed that MEMS gyroscope output didn’t come back to the original position, and resulted in a permanent output shift of 1.85deg/s.

MEMS Gyroscopes Susceptibility to High Frequency Acoustic Noise

2009 ◽  
Author(s):  
Grant Roth ◽  
George T. Flowers ◽  
Robert Dean
Keyword(s):  
High Frequency ◽  
Detrimental Effect ◽  
Acoustic Noise ◽  
Harsh Environments ◽  
Sound Power ◽  
High Frequencies ◽  
Inertial Measurement ◽  
Mems Gyroscopes ◽  
Measurement Units ◽  
Mitigation Techniques

MEMS gyroscopes are becoming more prevalent in inexpensive inertial measurement units used in a variety of harsh environments. It has been shown in previous studies that high power high frequency acoustic noise can have a detrimental effect on these devices. This study examines the threshold of the sound power levels required at these high frequencies to generate detrimental effects on the output of MEMS gyroscopes. This study provides basic background work for further research into mitigation techniques for higher powered high frequency acoustic noise.

Micromachined Vibration Isolation Filters to Enhance Packaging for Mechanically Harsh Environments

2005 ◽  
Vol 2 (4) ◽  
pp. 223-231 ◽  
Author(s):  
Robert Dean ◽  
George Flowers ◽  
Nicole Sanders ◽  
Roland Horvath ◽  
Michael Kranz ◽  
...  
Keyword(s):  
High Frequency ◽  
Vibration Isolation ◽  
Active Filter ◽  
Harsh Environments ◽  
Mechanical Vibrations ◽  
Additional Advantage ◽  
Filter Performance ◽  
Useful Components ◽  
Mems Gyroscopes ◽  
Filter Structures

Some harsh environments, such as those encountered by missiles, rockets and various types of industrial machinery, contain high frequency mechanical vibrations. Unfortunately, some very useful components are sensitive to these high frequency vibrations. Examples include MEMS gyroscopes, oscillators and some micro-optics. Exposure to high frequency mechanical vibrations present in the operating environment can result in problems ranging from an increased noise floor to component failure. Passive micromachined silicon lowpass filter structures (spring-mass-damper) have been demonstrated in recent years. Since they usually possess a low vertical profile, they can be utilized as the packaging substrate for the sensitive component requiring vibration isolation. The performance of these filter structures is typically limited by low damping and a lack of tunability after fabrication. However, filter performance can be enhanced by integrating fluidic damping techniques with the passive filter or by integrating a micromachined actuator with state feedback to realize an active filter. The active filter has the additional advantage of post fabrication tunability.

Mitigation of the Effects of High Levels of High-Frequency Noise on MEMS Gyroscopes Using Microfibrous Cloth

2015 ◽  
Author(s):  
Pregassen Soobramaney ◽  
George Flowers ◽  
Robert Dean
Keyword(s):  
High Frequency ◽  
Stability Control ◽  
Harsh Environments ◽  
Vehicle Stability ◽  
Frequency Noise ◽  
High Frequency Noise ◽  
Acoustical Properties ◽  
Vehicle Stability Control ◽  
Mems Gyroscopes ◽  
Metallic Fibers

MEMS gyroscopes are being used in a variety of applications such as camcorders, vehicle stability control and game controllers. Sometimes they are used in harsh environments such as high levels of high-frequency noise. If the frequency of the noise coincides with the natural frequency of the gyroscope, the output of the latter is corrupted. Experiments were performed to demonstrate the effects of noise on MEMS gyroscopes. The focus of this research is to investigate a passive approach to attenuate the effects of noise on MEMS gyroscopes using microfibrous cloth. The candidate materials are made by intermingling and fusing micro metal fibers together using cellulose in wet-lay papermaking technique and sintering of the resulting product to remove the cellulose and bonds the metallic fibers. In this regard, four types of nickel microfibrous material were fabricated using three diameters of nickel fibers. The Delany-Bazley analytical acoustical model was used to determine the optimum acoustical properties of the material. The properties were then used to calculate the absorption coefficients of the microfibrous media. Enclosures were then designed and fabricated from these materials to evaluate the noise attenuation effects on MEMS gyroscopes. Acoustical tests performed in a reverberation room show up to 90% reduction in the amplitude of the effects of noise. The results from simulation modeling and from these experimental evaluations are presented and discussed.

Combined Temperature and Humidity Effects on MEMS Vibratory Gyroscope Sensor

2011 ◽  
Author(s):  
Chandradip Patel ◽  
Patrick McCluskey
Keyword(s):  
Long Term Effects ◽  
Mems Gyroscope ◽  
Vibratory Gyroscopes ◽  
Vibratory Gyroscope ◽  
Temperature And Humidity ◽  
Mems Gyroscopes ◽  
Zero Rate ◽  
Commercial Off The Shelf

Reliability and long term stability are the greatest challenges for commercialization of MEMS gyroscopes. Their vast use in different applications that required MEMS gyroscopes to function from medium to harsh environments make necessary to evaluate the performance of MEMS gyroscope under those conditions. This paper focuses on the combined long term effects of temperature and humidity on the performance of MEMS vibratory gyroscope. Performance of the MEMS gyroscope was evaluated over time by conducting temperature humidity bias (THB) test on a COTS (commercial off-the-shelf) single axis MEMS vibratory gyroscope having an operating temperature range from −40°C to +85°C. The gyroscope sensors were exposed to 60°C and 90%RH (Relative Humidity) for 500 hours. Six single axis gyroscopes were tested, three with in-situ device calibration and three without in-situ device calibration. Out of three MEMS vibratory gyroscopes tested without in-situ device calibration, it was observed that samples had minimum and maximum in-situ zero rate output (ZRO) drift of 1.3°/s and 2.2°/s respectively over 500 hours. These drifts were disappeared when gyroscope sensors were tested after six months by keeping at room condition. Other three single axis gyroscopes were tested in the same chamber with in-situ device calibration which didn’t show any major performance ZRO drift.

Stability of Ring-Type MEMS Gyroscopes Subjected to Stochastic Angular Speed Fluctuation

2017 ◽  
Vol 139 (4) ◽  
Author(s):  
Samuel F. Asokanthan ◽  
Soroush Arghavan ◽  
Mohamed Bognash
Keyword(s):  
Angular Velocity ◽  
Degrees Of Freedom ◽  
Microelectromechanical Systems ◽  
Damping Ratio ◽  
Operating Conditions ◽  
System Stability ◽  
System Response ◽  
Ring Type ◽  
Mems Gyroscopes ◽  
The Stability

Effect of stochastic fluctuations in angular velocity on the stability of two degrees-of-freedom ring-type microelectromechanical systems (MEMS) gyroscopes is investigated. The governing stochastic differential equations (SDEs) are discretized using the higher-order Milstein scheme in order to numerically predict the system response assuming the fluctuations to be white noise. Simulations via Euler scheme as well as a measure of largest Lyapunov exponents (LLEs) are employed for validation purposes due to lack of similar analytical or experimental data. The response of the gyroscope under different noise fluctuation magnitudes has been computed to ascertain the stability behavior of the system. External noise that affect the gyroscope dynamic behavior typically results from environment factors and the nature of the system operation can be exerted on the system at any frequency range depending on the source. Hence, a parametric study is performed to assess the noise intensity stability threshold for a number of damping ratio values. The stability investigation predicts the form of threshold fluctuation intensity dependence on damping ratio. Under typical gyroscope operating conditions, nominal input angular velocity magnitude and mass mismatch appear to have minimal influence on system stability.

scholarly journals Design Approach for Reducing Cross-Axis Sensitivity in a Single-Drive Multi-Axis MEMS Gyroscope

Micromachines ◽  
2021 ◽  
Vol 12 (8) ◽  
pp. 902
Author(s):  
Hussamud Din ◽  
Faisal Iqbal ◽  
Byeungleul Lee
Keyword(s):  
Microelectromechanical Systems ◽  
Reduction Rate ◽  
Design Technique ◽  
Matching Method ◽  
Mems Gyroscope ◽  
Mode Split ◽  
The Cross ◽  
The Individual ◽  
Cross Axis ◽  
Ratio Matching

In this paper, a new design technique is presented to estimate and reduce the cross-axis sensitivity (CAS) in a single-drive multi-axis microelectromechanical systems (MEMS) gyroscope. A simplified single-drive multi-axis MEMS gyroscope, based on a mode-split approach, was analyzed for cross-axis sensitivity using COMSOL Multiphysics. A design technique named the “ratio-matching method” of drive displacement amplitudes and sense frequency differences ratios was proposed to reduce the cross-axis sensitivity. Initially, the cross-axis sensitivities in the designed gyroscope for x and y-axis were calculated to be 0.482% and 0.120%, respectively, having an average CAS of 0.301%. Using the proposed ratio-matching method and design technique, the individual cross-axis sensitivities in the designed gyroscope for x and y-axis were reduced to 0.018% and 0.073%, respectively. While the average CAS was reduced to 0.045%, showing a reduction rate of 85.1%. Moreover, the proposed ratio-matching method for cross-axis sensitivity reduction was successfully validated through simulations by varying the coupling spring position and sense frequency difference variation analyses. Furthermore, the proposed methodology was verified experimentally using fabricated single-drive multi-axis gyroscope.

scholarly journals Towards a biomimetic gyroscope inspired by the fly's haltere using microelectromechanical systems technology

2014 ◽  
Vol 11 (99) ◽  
pp. 20140573 ◽  
Author(s):  
H. Droogendijk ◽  
R. A. Brookhuis ◽  
M. J. de Boer ◽  
R. G. P. Sanders ◽  
G. J. M. Krijnen
Keyword(s):  
Microelectromechanical Systems ◽  
Damping Ratio ◽  
Fast Response ◽  
Gyroscopic System ◽  
Drive Mode ◽  
Mems Gyroscope ◽  
Coriolis Forces ◽  
Mems Technology ◽  
Large Measurement ◽  
Theoretical Performance

Flies use so-called halteres to sense body rotation based on Coriolis forces for supporting equilibrium reflexes. Inspired by these halteres, a biomimetic gimbal-suspended gyroscope has been developed using microelectromechanical systems (MEMS) technology. Design rules for this type of gyroscope are derived, in which the haltere-inspired MEMS gyroscope is geared towards a large measurement bandwidth and a fast response, rather than towards a high responsivity. Measurements for the biomimetic gyroscope indicate a (drive mode) resonance frequency of about 550 Hz and a damping ratio of 0.9. Further, the theoretical performance of the fly's gyroscopic system and the developed MEMS haltere-based gyroscope is assessed and the potential of this MEMS gyroscope is discussed.

scholarly journals AUTOMATION METHODS FOR SPECIAL VEHICLES OPERATING IN HARSH ENVIRONMENTS

2021 ◽  
Vol 23 (3) ◽  
pp. 91-97
Author(s):  
D.E. Chickrin ◽  
Keyword(s):  
Autonomous Vehicle ◽  
Harsh Environments ◽  
Harsh Environment ◽  
Mining Operations ◽  
Experimental Prototype

This paper describes the main principles for development autonomous vehicle, which could be used in harsh environment, especially in mining operations. Actually, the overall structure of system is shown which developed under the author's guidance. In addition, the main scenarios of the usage are presented. Additionally, there will be described significance of the experimental prototype for testing and checking all subsystems.

The Underwater Effects of High Power, High Frequency Acoustic Noise on MEMS Gyroscopes

2011 ◽  
Author(s):  
William N. Yunker ◽  
Pregassen Soobramaney ◽  
Meagan Black ◽  
Robert N. Dean ◽  
George T. Flowers ◽  
...  
Keyword(s):  
High Power ◽  
High Frequency ◽  
Proof Mass ◽  
Acoustic Noise ◽  
Angular Rate ◽  
Autonomous Underwater Vehicles ◽  
Mechanical Shock ◽  
Negative Effects ◽  
Mems Gyroscopes ◽  
New Applications

Unlike their macroscale counterparts, MEMS gyroscopes use a vibrating proof mass rather than a rotational mass to sense changes in angular rate. They are also smaller and less expensive than traditional gyroscopes. For this reason, MEMS gyroscopes are being used in many new applications, some of which include operation in harsh environments. There has been much research on the negative effects of the performance of MEMS gyroscopes in environments that experience mechanical shock, high frequency vibration, and high frequency acoustic noise in air. However, MEMS gyroscopes are beginning to be used in underwater applications such as autonomous underwater vehicles, digital compasses, and torpedo guidance systems. The results of this experiment demonstrate that MEMS gyroscopes submerged in water are susceptible to high power, high frequency acoustic noise at and near the resonant frequency of the proof mass. These effects are demonstrated using the ADXRS300 MEMS gyroscope.

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