The Underwater Effects of High Power, High Frequency Acoustic Noise on MEMS Gyroscopes

Unlike their macroscale counterparts, MEMS gyroscopes use a vibrating proof mass rather than a rotational mass to sense changes in angular rate. They are also smaller and less expensive than traditional gyroscopes. For this reason, MEMS gyroscopes are being used in many new applications, some of which include operation in harsh environments. There has been much research on the negative effects of the performance of MEMS gyroscopes in environments that experience mechanical shock, high frequency vibration, and high frequency acoustic noise in air. However, MEMS gyroscopes are beginning to be used in underwater applications such as autonomous underwater vehicles, digital compasses, and torpedo guidance systems. The results of this experiment demonstrate that MEMS gyroscopes submerged in water are susceptible to high power, high frequency acoustic noise at and near the resonant frequency of the proof mass. These effects are demonstrated using the ADXRS300 MEMS gyroscope.