Facing-target mid-frequency magnetron reactive sputtered hafnium oxide film: Morphology and electrical properties

2016 ◽  
Vol 68 (5) ◽  
pp. 679-685
Author(s):  
Yu Zhang ◽  
Jun Xu ◽  
You-Nian Wang ◽  
Chi Kyu Choi ◽  
Da-Yu Zhou
Keyword(s):  
Electrical Properties ◽  
Oxide Film ◽  
Hafnium Oxide ◽  
Film Morphology

scholarly journals X-ray absorption spectroscopy study on oxygen-deficient hafnium oxide film

2008 ◽  
Vol 100 (4) ◽  
pp. 042044 ◽  
Author(s):  
D-Y Cho ◽  
C-H Min ◽  
J-Y Kim ◽  
J-H Park ◽  
S-J Oh ◽  
...  
Keyword(s):  
Oxide Film ◽  
Absorption Spectroscopy ◽  
Hafnium Oxide ◽  
Spectroscopy Study ◽  
X Ray ◽  
X Ray Absorption

Laser-driven detonation wave in hafnium oxide film: Defect controlled laser damage and ablation

2020 ◽  
Vol 128 (12) ◽  
pp. 123101
Author(s):  
Yejia Xu ◽  
David H. Dunlap ◽  
Luke A. Emmert ◽  
Wolfgang Rudolph
Keyword(s):  
Detonation Wave ◽  
Oxide Film ◽  
Hafnium Oxide ◽  
Laser Damage ◽  
Film Defect

Thermal stability of an ultrathin hafnium oxide film on plasma nitrided Si(100)

2013 ◽  
Vol 616 ◽  
pp. 104-109 ◽  
Author(s):  
K. Skaja ◽  
F. Schönbohm ◽  
D. Weier ◽  
T. Lühr ◽  
C. Keutner ◽  
...  
Keyword(s):  
Thermal Stability ◽  
Oxide Film ◽  
Hafnium Oxide ◽  
Thermal Stability Of

The role of amine ligands in governing film morphology and electrical properties of copper films derived from copper formate-based molecular inks

Nanoscale ◽  
2018 ◽  
Vol 10 (15) ◽  
pp. 6911-6921 ◽  
Author(s):  
Chantal Paquet ◽  
Thomas Lacelle ◽  
Xiangyang Liu ◽  
Bhavana Deore ◽  
Arnold J. Kell ◽  
...  
Keyword(s):  
Thermal Decomposition ◽  
Electrical Properties ◽  
Release Profile ◽  
Copper Films ◽  
Film Morphology ◽  
Copper Formate ◽  
Amine Ligands

The release profile of ligands from copper formate complexes during thermal decomposition influences the morphology and electrical properties of their films.

scholarly journals Tetrathiotetracene thin film morphology and electrical properties

2016 ◽  
Vol 598 ◽  
pp. 214-218 ◽  
Author(s):  
K. Pudzs ◽  
A. Vembris ◽  
J. Busenbergs ◽  
M. Rutkis ◽  
S. Woodward
Keyword(s):  
Thin Film ◽  
Electrical Properties ◽  
Film Morphology

The effect of aluminum oxide incorporation on the material and electrical properties of hafnium oxide on Ge

2008 ◽  
Vol 93 (23) ◽  
pp. 233501 ◽  
Author(s):  
Monica Sawkar-Mathur ◽  
Ya-Chuan Perng ◽  
Jun Lu ◽  
Hans-Olof Blom ◽  
John Bargar ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Aluminum Oxide ◽  
Hafnium Oxide

Effect of reactive magnetron sputtering parameters on structural and electrical properties of hafnium oxide thin films

2014 ◽  
Vol 301 ◽  
pp. 28-33 ◽  
Author(s):  
Magdalena Szymańska ◽  
Sylwia Gierałtowska ◽  
Łukasz Wachnicki ◽  
Marcin Grobelny ◽  
Katarzyna Makowska ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Hafnium Oxide ◽  
Reactive Magnetron Sputtering ◽  
Reactive Magnetron ◽  
Oxide Thin Films ◽  
Structural And Electrical Properties
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