scholarly journals Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

10.3791/58272 ◽  
2018 ◽  
Author(s):  
Fernando E. Camino ◽  
Vitor R. Manfrinato ◽  
Aaron Stein ◽  
Lihua Zhang ◽  
Ming Lu ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Electron Beam Lithography ◽  
Scanning Transmission Electron Microscope ◽  
Single Digit ◽  
Scanning Transmission Electron ◽  
Transmission Electron ◽  
Scanning Transmission ◽  
Aberration Corrected
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