scholarly journals Epitaxial Growth of Perovskite Strontium Titanate on Germanium via Atomic Layer Deposition

10.3791/54268 ◽  
2016 ◽  
Author(s):  
Edward L. Lin ◽  
Bryce I. Edmondson ◽  
Shen Hu ◽  
John G. Ekerdt
Keyword(s):  
Atomic Layer Deposition ◽  
Epitaxial Growth ◽  
Strontium Titanate ◽  
Atomic Layer ◽  
Layer Deposition

Textured strontium titanate layers on platinum by atomic layer deposition

2012 ◽  
Vol 520 (21) ◽  
pp. 6535-6540 ◽  
Author(s):  
T. Blomberg ◽  
J. Anttila ◽  
S. Haukka ◽  
M. Tuominen ◽  
M. Lukosius ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Strontium Titanate ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Epitaxial Growth of MgxCa1–xO on GaN by Atomic Layer Deposition

Nano Letters ◽  
2016 ◽  
Vol 16 (12) ◽  
pp. 7650-7654 ◽  
Author(s):  
Xiabing Lou ◽  
Hong Zhou ◽  
Sang Bok Kim ◽  
Sami Alghamdi ◽  
Xian Gong ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Epitaxial Growth ◽  
Atomic Layer ◽  
Layer Deposition

Nucleation and growth process of atomic layer deposition platinum nanoparticles on strontium titanate nanocuboids

2017 ◽  
Vol 28 (18) ◽  
pp. 185704 ◽  
Author(s):  
Chuandao Wang ◽  
Linhua Hu ◽  
Kenneth Poeppelmeier ◽  
Peter C Stair ◽  
Laurence Marks
Keyword(s):  
Atomic Layer Deposition ◽  
Strontium Titanate ◽  
Platinum Nanoparticles ◽  
Growth Process ◽  
Atomic Layer ◽  
Nucleation And Growth ◽  
Layer Deposition

Atomic Layer Deposition of Ruthenium Films on Strontium Titanate

2011 ◽  
Vol 11 (9) ◽  
pp. 8378-8382 ◽  
Author(s):  
Kaupo Kukli ◽  
Marianna Kemell ◽  
Jun Lu ◽  
Lars Hultman ◽  
Stefan Riedel ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Strontium Titanate ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Low temperature epitaxial growth of GaP on Si by atomic-layer deposition with plasma activation

2020 ◽  
Vol 53 (34) ◽  
pp. 345105
Author(s):  
A V Uvarov ◽  
A S Gudovskikh ◽  
V N Nevedomskiy ◽  
A I Baranov ◽  
D A Kudryashov ◽  
...  
Keyword(s):  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Epitaxial Growth ◽  
Atomic Layer ◽  
Plasma Activation ◽  
Layer Deposition

Epitaxial growth of LaAlO3 on SrTiO3-buffered Si (001) substrates by atomic layer deposition

2013 ◽  
Vol 363 ◽  
pp. 150-157 ◽  
Author(s):  
Thong Q. Ngo ◽  
Agham Posadas ◽  
Martin D. McDaniel ◽  
Domingo A. Ferrer ◽  
John Bruley ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Epitaxial Growth ◽  
Atomic Layer ◽  
Layer Deposition

Epitaxial growth of TiO2 films in a hydroxyl-free atomic layer deposition process

2002 ◽  
Vol 235 (1-4) ◽  
pp. 293-299 ◽  
Author(s):  
Mikael Schuisky ◽  
Kaupo Kukli ◽  
Jaan Aarik ◽  
Jun Lu ◽  
Anders Hårsta
Keyword(s):  
Atomic Layer Deposition ◽  
Epitaxial Growth ◽  
Atomic Layer ◽  
Deposition Process ◽  
Tio2 Films ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition
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