Non-scanning, non-interferometric, three-dimensional optical prof ilometer with nanometer resolution
2011 ◽
Vol 9
(10)
◽
pp. 101202-101204
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2008 ◽
Vol 112
(26)
◽
pp. 9769-9776
◽
2011 ◽
Vol 193
(2)
◽
pp. 333-346
◽
1998 ◽
Vol 69
(7)
◽
pp. 2762-2766
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Keyword(s):
Keyword(s):