Measurement of small displacement based on surface plasmon resonance heterodyne interferometry

2011 ◽  
Vol 49 (7) ◽  
pp. 811-815 ◽  
Author(s):  
Jiun-You Lin ◽  
Kun-Huang Chen ◽  
Jing-Heng Chen
Keyword(s):  
Surface Plasmon Resonance ◽  
Surface Plasmon ◽  
Plasmon Resonance ◽  
Small Displacement ◽  
Heterodyne Interferometry ◽  
Displacement Based

Z-Axis Displacement Sensor Based on Total-Internal Reflection and Surface Plasmon Resonance in Heterodyne Interferometry

2013 ◽  
Vol 746 ◽  
pp. 564-569
Author(s):  
Shinn Fwu Wang ◽  
Ting Huan Chen ◽  
Pei Cheng Ke ◽  
Yi Chu ◽  
Yu Pin Liao ◽  
...  
Keyword(s):  
Surface Plasmon Resonance ◽  
Surface Plasmon ◽  
Plasmon Resonance ◽  
Total Internal Reflection ◽  
High Sensitivity ◽  
Side Surface ◽  
Internal Reflection ◽  
Displacement Sensor ◽  
Small Displacement ◽  
Heterodyne Interferometry

In this paper, a z-axis displacement sensor based on Total-Internal Reflection and Surface Plasmon Resonance in heterodyne interferometry is proposed. The sensing unit is composed of a parallelogram prism, i.e. elongated prism, and a displacement probe. One side surface of the elongated prism was coated with a 2 nm Ti-film and a 45.5 nm Au-film, but the other side surface of that were not coated with metal films. The z-axis displacement sensor is with high sensitivity and resolution due to multiple attenuated total reflections and total internal reflections effects. Besides, we can obtain the results of the experiment in a distant place by uses of the USB data acquisition card (DAQ card) and a ZigBee module. In fact, the displacement resolution of the z-axis displacement meter can reach sub-nanometer by numerical simulation. The small-displacement sensor has some merits, e.g., in real-time test, easy operation, high measurement accuracy, high resolution, etc.

Experimental Evaluation of a Small-Displacement Sensing System Based on the Surface Plasmon Resonance Technology in Heterodyne Interferometry

2013 ◽  
Vol 479-480 ◽  
pp. 682-686
Author(s):  
Shinn Fwu Wang ◽  
Chi Tun Chen ◽  
Fu Hsi Kao ◽  
Yi Chu ◽  
Shyh Rong Lay ◽  
...  
Keyword(s):  
Surface Plasmon Resonance ◽  
Surface Plasmon ◽  
Plasmon Resonance ◽  
High Sensitivity ◽  
Attenuated Total Reflection ◽  
Displacement Sensor ◽  
Small Displacement ◽  
Heterodyne Interferometry ◽  
Sensing System ◽  
Data Acquisition Card

In this article, a small-displacement sensing system based on the surface plasmon resonance technology in heterodyne interferometry is proposed and evaluated. The basic sensing unit is composed of a prism assembly and a displacement probe. The prism assembly consists of a halfwave (λ/2) plate, two right-angle prisms and two rotation stages. The small-displacement sensor is with high sensitivity and resolution due to the attenuated total reflection effect in heterodyne interferometry. Besides, we can obtain the results of the experiment in a distant place by uses of the USB data acquisition card (DAQ card) and a ZigBee module. It can be found that the displacement resolution of the small-displacement sensor can reach 0.155nm by numerical simulation. The small-displacement sensor has some merits, e.g., easy operation, high measurement accuracy, high resolution and rapid measurement, etc.

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