scholarly journals Processing and Analysis of Long-Range Scans with an Atomic Force Microscope (AFM) in Combination with Nanopositioning and Nanomeasuring Technology for Defect Detection and Quality Control

Sensors ◽  
2021 ◽  
Vol 21 (17) ◽  
pp. 5862
Author(s):  
Ingo Ortlepp ◽  
Jaqueline Stauffenberg ◽  
Eberhard Manske
Keyword(s):  
Quality Control ◽  
High Resolution ◽  
Atomic Force Microscope ◽  
Range Of Motion ◽  
Defect Detection ◽  
Large Range ◽  
The Other ◽  
Atomic Force ◽  
Measuring Machine ◽  
The One

This paper deals with a planar nanopositioning and -measuring machine, the so-called nanofabrication machine (NFM-100), in combination with a mounted atomic force microscope (AFM). This planar machine has a circular moving range of 100 mm. Due to the possibility of detecting structures in the nanometre range with an atomic force microscope and the large range of motion of the NFM-100, structures can be analysed with high resolution and precision over large areas by combining the two systems, which was not possible before. On the basis of a grating sample, line scans over lengths in the millimetre range are demonstrated on the one hand; on the other hand, the accuracy as well as various evaluation methods are discussed and analysed.

scholarly journals Redesigned Sensor Holder for an Atomic Force Microscope with an Adjustable Probe Direction

2021 ◽  
Author(s):  
Janik Schaude ◽  
Maxim Fimushkin ◽  
Tino Hausotte
Keyword(s):  
Atomic Force Microscope ◽  
Piezoelectric Actuator ◽  
High Speed ◽  
Closed Loop ◽  
Coefficient Of Thermal Expansion ◽  
Measuring System ◽  
Contact Mode ◽  
Loop Control ◽  
Atomic Force ◽  
Measuring Machine

AbstractThe article presents a redesigned sensor holder for an atomic force microscope (AFM) with an adjustable probe direction, which is integrated into a nano measuring machine (NMM-1). The AFM, consisting of a commercial piezoresistive cantilever operated in closed-loop intermitted contact-mode, is based on two rotational axes, which enable the adjustment of the probe direction to cover a complete hemisphere. The axes greatly enlarge the metrology frame of the measuring system by materials with a comparatively high coefficient of thermal expansion. The AFM is therefore operated within a thermostating housing with a long-term temperature stability of 17 mK. The sensor holder, connecting the rotational axes and the cantilever, inserted one adhesive bond, a soldered connection and a geometrically undefined clamping into the metrology circle, which might also be a source of measurement error. It has therefore been redesigned to a clamped senor holder, which is presented, evaluated and compared to the previous glued sensor holder within this paper. As will be shown, there are no significant differences between the two sensor holders. This leads to the conclusion, that the three aforementioned connections do not deteriorate the measurement precision, significantly. As only a minor portion of the positioning range of the piezoelectric actuator is needed to stimulate the cantilever near its resonance frequency, a high-speed closed-loop control that keeps the cantilever within its operating range using this piezoelectric actuator further on as actuator was implemented and is presented within this article.

scholarly journals Set-up of a high-resolution 300 mK atomic force microscope in an ultra-high vacuum compatible 3He/10 T cryostat

2016 ◽  
Vol 87 (7) ◽  
pp. 073702 ◽  
Author(s):  
H. von Allwörden ◽  
K. Ruschmeier ◽  
A. Köhler ◽  
T. Eelbo ◽  
A. Schwarz ◽  
...  
Keyword(s):  
High Resolution ◽  
Atomic Force Microscope ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
Atomic Force ◽  
Set Up

High-resolution atomic force microscope nanotip grown by self-field emission

2002 ◽  
Vol 81 (16) ◽  
pp. 3037-3039 ◽  
Author(s):  
C. H. Oon ◽  
J. T. L. Thong ◽  
Y. Lei ◽  
W. K. Chim
Keyword(s):  
High Resolution ◽  
Atomic Force Microscope ◽  
Field Emission ◽  
Atomic Force

Design and control of multi-actuated atomic force microscope for large-range and high-speed imaging

2016 ◽  
Vol 160 ◽  
pp. 213-224 ◽  
Author(s):  
I. Soltani Bozchalooi ◽  
A. Careaga Houck ◽  
J.M. AlGhamdi ◽  
K. Youcef-Toumi
Keyword(s):  
Atomic Force Microscope ◽  
High Speed ◽  
Large Range ◽  
High Speed Imaging ◽  
Atomic Force ◽  
And Control

scholarly journals Atomic force microscope with an adjustable probe direction and piezoresistive cantilevers operated in tapping-mode / Im Tapping-Modus betriebenes Rasterkraftmikroskop mit einstellbarer Antastrichtung und piezoresistiven Cantilevern

2019 ◽  
Vol 86 (s1) ◽  
pp. 12-16
Author(s):  
Janik Schaude ◽  
Julius Albrecht ◽  
Ute Klöpzig ◽  
Andreas C. Gröschl ◽  
Tino Hausotte
Keyword(s):  
Atomic Force Microscope ◽  
Metrological Traceability ◽  
Step Height ◽  
Tapping Mode ◽  
Atomic Force ◽  
In Situ Calibration ◽  
Measuring Machine ◽  
Piezoresistive Cantilevers

AbstractThis article presents a new tilting atomic force microscope (AFM) with an adjustable probe direction and piezoresistive cantilever operated in tapping-mode. The AFM is based on two rotational axes, which enable the adjustment of the probe direction to cover a complete hemisphere. The whole setup is integrated into a nano measuring machine (NMM-1) and the metrological traceability of the piezoresistive cantilever is warranted by in situ calibration on the NMM-1. To demonstrate the capabilities of the tilting AFM, measurements were conducted on a step height standard.

Investigation of Hybridization Efficiency of a Sequence-Orientated Coaxial DNA Probe Microarryed on Biochips Using Atomic Force Microscope

2013 ◽  
Vol 284-287 ◽  
pp. 315-319
Author(s):  
Jui Chuang Wu ◽  
Dan Kai Yang ◽  
Yane Shu Lin ◽  
Jun Yi Chen
Keyword(s):  
Atomic Force Microscope ◽  
Fluorescent Dyes ◽  
Laser Scanner ◽  
Dna Probe ◽  
The Other ◽  
Chip Surface ◽  
Surface Probe ◽  
Atomic Force ◽  
Glass Slides ◽  
Hybridization Efficiency

Two sequence-inversed probes were microarrayed on glass slides to study the hybridization efficiency with their DNA targets. A fluorescence laser scanner and an atomic force microscope (AFM) were utilized to investigate the efficiency in different hybridization cases and their corresponding depth changes on the chips. The sequences of two targets were designed to be fully complementary to their shared DNA probe in a coaxial stacking configuration. In other words, after the first DNA target is hybridized (pre-hybridizing) onto the probe, the second one is stacked onto the non-hybridized region of the same probe. The pre-hybridizing and the second DNA targets were distinguished by two distinct fluorescent dyes. The enhancement of the hybridization efficiency was investigated through the comparison between the stacking and individual hybridization configurations. AFM was used to measure the depths of two probes at different steps of hybridization. The results indicated that the depths increased as the hybridization proceeded. Probe#1, pre-hybridizing close to the chip surface, obtained a thicker depth than the other probe pre-hybridizing away from the chip surface, Probe#2. A hypothesis was proposed to explain how the depth variation was associated with the observed hybridization efficiency.

scholarly journals A Correlative Defect Analyzer Combining Glide Test with Atomic Force Microscope

2013 ◽  
Vol 2013 ◽  
pp. 1-8 ◽  
Author(s):  
Jizhong He
Keyword(s):  
High Resolution ◽  
Atomic Force Microscope ◽  
Optical Imaging ◽  
Hard Disk Drive ◽  
Disk Drive ◽  
Atomic Force ◽  
Typical Data ◽  
Afm Imaging ◽  
Afm Analysis

We have developed a novel instrument combining a glide tester with an Atomic Force Microscope (AFM) for hard disk drive (HDD) media defect test and analysis. The sample stays on the same test spindle during both glide test and AFM imaging without losing the relevant coordinates. This enables an in situ evaluation with the high-resolution AFM of the defects detected by the glide test. The ability for the immediate follow-on AFM analysis solves the problem of relocating the defects quickly and accurately in the current workflow. The tool is furnished with other functions such as scribing, optical imaging, and head burnishing. Typical data generated from the tool are shown at the end of the paper. It is further demonstrated that novel experiments can be carried out on the platform by taking advantage of the correlative capabilities of the tool.

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